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Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator

Journal of micromechanics and microengineering, 2020-11, Vol.30 (11), p.115020

2020

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A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

Journal of micromechanics and microengineering, 2011-06, Vol.21 (6), p.065012

2011

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On the design of piezoelectric MEMS microspeaker for the sound pressure level enhancement

Sensors and actuators. A. Physical., 2020-05, Vol.306, p.111960, Article 111960

2020

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Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

Journal of micromechanics and microengineering, 2015-02, Vol.25 (2), p.25014-14

2015

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Thermal Actuated Solid Tunable Lens

IEEE photonics technology letters, 2006-11, Vol.18 (21), p.2191-2193

2006

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A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes

Journal of microelectromechanical systems, 2012-12, Vol.21 (6), p.1329-1337

2012

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Development of two-stage solidification technology for implementing micro structures with liquid magnetic polymer and solid magnetic anisotropic polymer

Journal of micromechanics and microengineering, 2014-09, Vol.24 (9), p.95024-12

2014

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Monolithic CMOS-MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance Enhancement

Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1916-1927

2015

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Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique

IEEE transactions on electron devices, 2010-07, Vol.57 (7), p.1670-1679

2010

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Development of patterned carbon nanotubes on a 3D polymer substrate for the flexible tactile sensor application

Journal of micromechanics and microengineering, 2011-11, Vol.21 (11), p.115012

2011

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Static and dynamic mechanical properties of polydimethylsiloxane/carbon nanotube nanocomposites

Thin solid films, 2009-07, Vol.517 (17), p.4895-4901

2009

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Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane

Sensors and actuators. A. Physical., 2008-07, Vol.145-146, p.14-22

2008

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Development of 3D carbon nanotube interdigitated finger electrodes on polymer substrate for flexible capacitive sensor application

Nanotechnology, 2013-11, Vol.24 (44), p.444006-444006

2013

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THD improvement of piezoelectric MEMS speakers by dual cantilever units with well-designed resonant frequencies

Sensors and actuators. A. Physical., 2024-10, Vol.377, p.115717, Article 115717

2024

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Microneedle Array Integrated With CNT Nanofilters for Controlled and Selective Drug Delivery

Journal of microelectromechanical systems, 2014-10, Vol.23 (5), p.1036-1044

2014

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High- Q Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

Journal of microelectromechanical systems, 2012-06, Vol.21 (3), p.688-701

2012

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Design of a Digitized Vibration Detector Implemented by CMOS Digitized Capacitive Transducer With In-Plane SoI Accelerometer

IEEE sensors journal, 2014-08, Vol.14 (8), p.2546-2556

2014

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Magnetostatic torsional actuator with embedded nickel structures for the improvement of driving force and wobble motion

Journal of micromechanics and microengineering, 2011-09, Vol.21 (9), p.95007-8

2011

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Integration and Encapsulation of Light-Emitting Diode and CMOS-MEMS Chips for Fluorescence Quenching Gas Sensor

Frontiers in mechanical engineering, 2022-05, Vol.8

2022

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Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

Journal of micromechanics and microengineering, 2009-10, Vol.19 (10), p.105017-105017 (7)

2009

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A Fully Differential CMOS―MEMS DETF Oxide Resonator With Q > 4800 and Positive TCF

IEEE electron device letters, 2012-05, Vol.33 (5), p.721-723

2012

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On the influence of magnetic flux guide location to the out-of-plane magnetic field sensing of chip-scale AMR sensor

Sensors and actuators. A. Physical., 2024-09, Vol.375, p.115517, Article 115517

2024

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A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer

Journal of micromechanics and microengineering, 2011-10, Vol.21 (10), p.105006

2011

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A Novel Zero-Insertion-Force (ZIF) Micro (\mu) -Connector: Design, Fabrication, and Measurements

IEEE transactions on industrial electronics (1982), 2009-04, Vol.56 (4), p.1040-1047

2009

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Develop and implement a novel tactile sensor array with stretchable and flexible grid-like spring

2017 IEEE SENSORS, 2017, p.1-3

2017

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Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator

A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

On the design of piezoelectric MEMS microspeaker for the sound pressure level enhancement

Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

Thermal Actuated Solid Tunable Lens

A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes

Development of two-stage solidification technology for implementing micro structures with liquid magnetic polymer and solid magnetic anisotropic polymer

Monolithic CMOS-MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance Enhancement

Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique

Development of patterned carbon nanotubes on a 3D polymer substrate for the flexible tactile sensor application

Static and dynamic mechanical properties of polydimethylsiloxane/carbon nanotube nanocomposites

Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane

Development of 3D carbon nanotube interdigitated finger electrodes on polymer substrate for flexible capacitive sensor application

THD improvement of piezoelectric MEMS speakers by dual cantilever units with well-designed resonant frequencies

Microneedle Array Integrated With CNT Nanofilters for Controlled and Selective Drug Delivery

High- Q Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

Design of a Digitized Vibration Detector Implemented by CMOS Digitized Capacitive Transducer With In-Plane SoI Accelerometer

Magnetostatic torsional actuator with embedded nickel structures for the improvement of driving force and wobble motion

Integration and Encapsulation of Light-Emitting Diode and CMOS-MEMS Chips for Fluorescence Quenching Gas Sensor

Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

A Fully Differential CMOS―MEMS DETF Oxide Resonator With Q > 4800 and Positive TCF

On the influence of magnetic flux guide location to the out-of-plane magnetic field sensing of chip-scale AMR sensor

A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer

A Novel Zero-Insertion-Force (ZIF) Micro (\mu) -Connector: Design, Fabrication, and Measurements

Develop and implement a novel tactile sensor array with stretchable and flexible grid-like spring

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