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New aspects of micromachining and microlithography using 157-nm excimer laser radiation

Applied physics. A, Materials science & processing, 1999-12, Vol.69 (7), p.S305-S307

1999

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Excimer laser: a new tool for precision micromachining

Optical and quantum electronics, 1995-12, Vol.27 (12), p.1319-1335

1995

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Epitaxial HTS thin films grown by PLD with a beam homogenizer

Applied surface science, 1998-05, Vol.127, p.477-480

1998

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Excimer lasers as tools for material processing in manufacturing

Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing, 1996, p.28-29

Endert, H.

1996

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New KrF and ArF excimer laser for advanced DUV lithography

Microelectronic engineering, 1995-02, Vol.27 (1), p.221-224

1995

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New ultraviolet lasers for material processing in industrial applications

Journal of laser applications, 1999-02, Vol.11 (1), p.1-6

1999

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Laser-Induced Damage in KDP Crystals. The Influence of Growth Ghosts and Growth Bands

Physica status solidi. A, Applied research, 1982-11, Vol.74 (1), p.141-148

1982

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Influence of Dislocations in KDP Crystals on Laser Damage Threshold

Kristall und Technik, 1981, Vol.16 (7), p.815-819

1981

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Enhanced localized intensities in surface scratches and their relation to laser damage in transparent dielectrics

Optics communications, 1978-01, Vol.27 (3), p.403-406

1978

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Laser-Induced Damage in KDP Crystals. The Influence of Growth Ghosts and Growth Bands

Physica status solidi. A, Applied research, 1982-11, Vol.74 (1), p.141-148

1982

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Excimer laser : a new tool for precision micromachining: Applications of laser technology in materials processing

Optical and quantum electronics, 1995, Vol.27 (12), p.1319-1335

1995

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New KrF and ArF excimer lasers for advanced deep ultraviolet optical lithography

Japanese Journal of Applied Physics, 1995, Vol.34 (8A), p.4050-4054

1995

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Influence of the real structure of KDP crystals on their optical strength

Soviet journal of quantum electronics, 1977-12, Vol.7 (12), p.1516-1518

1977

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Nanosecond X-ray topography of crystalline solids with a laser-produced plasma source

Physica status solidi. A, Applied research, 1981-12, Vol.68 (2), p.483-488

1981

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Anwendung Pyroelektrischer Sensoren in der Lasertechnik

Laser/Optoelektronik in der Technik / Laser/Optoelectronics in Engineering, p.370-373

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Use of asymmetric laser crystals for x-ray diagnostics of a laser plasma

Soviet journal of quantum electronics, 1982-09, Vol.12 (9), p.1170-1172

1982

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Epitaxial HTS thin films grown by PLD with a beam homogenizer

Applied surface science, 1998, Vol.127-29, p.477-480

1998

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Nanosecond X-ray topography of crystalline solids with a laser-produced plasma source

Physica status solidi. A, Applied research, 1981-12, Vol.68 (2), p.483-488

1981

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Novel emitter and receiver system for THz radiation consisting of a 2-T permanent magnet, a 1040-nm compact fiber laser, and a room-temperature-operating thermal receiver

Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557), 2001, Vol.2, p.II-II

2001

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Novel emitter and receiver system for THz radiation consisting of a 2-T permanent magnet, a 1040-nm compact fiber laser, and a room-temperature-operating thermal receiver

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170), 2001, p.105