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Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS

Acta materialia, 2006-10, Vol.54 (18), p.4731-4743

2006

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Wear resistant electrically conductive Au–ZnO nanocomposite coatings synthesized by e-beam evaporation

Wear, 2013-04, Vol.302 (1-2), p.955-962

2013

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Stronger silicon for microsystems

Acta materialia, 2010, Vol.58 (2), p.439-448

2010

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In-situ tribochemical formation of self-lubricating diamond-like carbon films

Carbon (New York), 2018-11, Vol.138 (C), p.61-68

2018

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Atomic Layer Deposition of Tungsten Disulphide Solid Lubricant Nanocomposite Coatings on Rolling Element Bearings

Tribology transactions, 2009-05, Vol.52 (3), p.284-292

2009

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On the thermal stability of physical vapor deposited oxide-hardened nanocrystalline gold thin films

Journal of applied physics, 2015-04, Vol.117 (14)

2015

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Mechanistic Aspects of Alkylchlorosilane Coupling Reactions

Langmuir, 1997-05, Vol.13 (11), p.2965-2972

1997

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An electron microscopy study of wear in polysilicon microelectromechanical systems in ambient air

Thin solid films, 2007-02, Vol.515 (6), p.3259-3266

2007

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Dichlorodimethylsilane as an anti-stiction monolayer for MEMS : A comparison to the octadecyltrichlosilane self-assembled monolayer

Journal of microelectromechanical systems, 2001-03, Vol.10 (1), p.41-49

2001

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Levitation compensation method for dynamic electrostatic comb-drive actuators

Sensors and actuators. A. Physical., 2008-05, Vol.143 (2), p.383-389

2008

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Atomic layer deposition of tungsten disulphide solid lubricant thin films

Journal of materials research, 2004-12, Vol.19 (12), p.3443-3446

2004

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Revisiting the dwell effect on friction behavior of molybdenum disulfide

Wear, 2023-08, Vol.526-527 (C), p.204876, Article 204876

2023

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MEMS lubrication with alcohol vapour

Tribology (Leeds), 2010-09, Vol.4 (3), p.109-114

2010

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Sidewall morphology of electroformed LIGA parts-implications for friction, adhesion, and wear control

Journal of microelectromechanical systems, 2005-04, Vol.14 (2), p.326-334

2005

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IEEE_Xplore

Grain boundary diffusivity of Ni in Au thin films and the associated degradation in electrical contact resistance due to surface oxide film formation

Journal of applied physics, 2013-03, Vol.113 (11)

2013

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Structural and tribological studies of MoS2 solid lubricant films having tailored metal-multilayer nanostructures

Surface & coatings technology, 1992-07, Vol.53 (1), p.13-23

1992

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Micron-Scale Friction and Sliding Wear of Polycrystalline Silicon Thin Structural Films in Ambient Air

Journal of microelectromechanical systems, 2008-10, Vol.17 (5), p.1144-1154

2008

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IEEE_Xplore

Electrical resistivity of Au-ZnO nanocomposite films

Journal of applied physics, 2013-04, Vol.113 (14)

2013

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Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS Devices

Journal of microelectromechanical systems, 2010-12, Vol.19 (6), p.1292-1298

2010

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IEEE_Xplore

Erratum: “Grain boundary diffusivity of Ni in Au thin films and the associated degradation in electrical contact resistance due to surface oxide film formation” [J. Appl. Phys. 113 , 114906 (2013)]

Journal of applied physics, 2013-04, Vol.113 (16), p.169901

2013

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On the thermal stability of physical vapor deposited oxide-hardened nanocrystalline gold thin films

Journal of applied physics, 2015-04, Vol.117 (14)

2015

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Mechanical properties of nickel ion-implanted with titanium and carbon and their relation to microstructure

Journal of applied physics, 1998-02, Vol.83 (3), p.1256-1264

1998

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Wear Mechanisms of Amorphous Carbon and Zirconia Coatings on Rigid Disk Magnetic Recording Media

Tribology transactions, 1993-01, Vol.36 (1), p.84-94

1993

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Microscale friction phenomena in oscillatory sliding contacts

Journal of applied physics, 2007-12, Vol.102 (12), p.123503-123503-8

2007

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Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

Acta materialia, 2003-11, Vol.51 (19), p.5837-5866

2003

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Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS

Wear resistant electrically conductive Au–ZnO nanocomposite coatings synthesized by e-beam evaporation

Stronger silicon for microsystems

In-situ tribochemical formation of self-lubricating diamond-like carbon films

Atomic Layer Deposition of Tungsten Disulphide Solid Lubricant Nanocomposite Coatings on Rolling Element Bearings

On the thermal stability of physical vapor deposited oxide-hardened nanocrystalline gold thin films

Mechanistic Aspects of Alkylchlorosilane Coupling Reactions

An electron microscopy study of wear in polysilicon microelectromechanical systems in ambient air

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS : A comparison to the octadecyltrichlosilane self-assembled monolayer

Levitation compensation method for dynamic electrostatic comb-drive actuators

Atomic layer deposition of tungsten disulphide solid lubricant thin films

Revisiting the dwell effect on friction behavior of molybdenum disulfide

MEMS lubrication with alcohol vapour

Sidewall morphology of electroformed LIGA parts-implications for friction, adhesion, and wear control

Grain boundary diffusivity of Ni in Au thin films and the associated degradation in electrical contact resistance due to surface oxide film formation

Structural and tribological studies of MoS2 solid lubricant films having tailored metal-multilayer nanostructures

Micron-Scale Friction and Sliding Wear of Polycrystalline Silicon Thin Structural Films in Ambient Air

Electrical resistivity of Au-ZnO nanocomposite films

Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS Devices

Erratum: “Grain boundary diffusivity of Ni in Au thin films and the associated degradation in electrical contact resistance due to surface oxide film formation” [J. Appl. Phys. 113 , 114906 (2013)]

On the thermal stability of physical vapor deposited oxide-hardened nanocrystalline gold thin films

Mechanical properties of nickel ion-implanted with titanium and carbon and their relation to microstructure

Wear Mechanisms of Amorphous Carbon and Zirconia Coatings on Rigid Disk Magnetic Recording Media

Microscale friction phenomena in oscillatory sliding contacts

Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

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