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Next-Generation, Super-Hard-to-Process Substrates and Their High-Efficiency Machining Process Technologies Used to Create Innovative Devices

International journal of automation technology, 2018-03, Vol.12 (2), p.145-153

Doi, Toshiro

2018

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Analysis of mechanically induced subsurface damage and its removal by chemical mechanical polishing for gallium nitride substrate

Precision engineering, 2021-01, Vol.67, p.350-358

2021

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Special Issue on Innovative SiC/GaN/Diamond Single-Crystal Substrates and Planarization Processing Technologies for the Next Generation ICT Society

International journal of automation technology, 2018-03, Vol.12 (2), p.143-144

Doi, Toshiro

2018

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Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Current applied physics, 2012-09, Vol.12, p.S41-S46

2012

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Preparation and characterization of composite coatings containing a quaternary ammonium salt as an anti-static agent

Progress in organic coatings, 2016-03, Vol.92, p.80-84

2016

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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

International journal of precision engineering and manufacturing, 2021-06, Vol.22 (6), p.1021-1029

2021

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A hybrid chemical modification strategy for monocrystalline silicon micro-grinding: Experimental investigation and synergistic mechanism

Chinese journal of aeronautics, 2023-07, Vol.36 (7), p.147-159

2023

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Downregulation of PRRX1 Confers Cancer Stem Cell-Like Properties and Predicts Poor Prognosis in Hepatocellular Carcinoma

Annals of surgical oncology, 2015-12, Vol.22 (Suppl 3), p.1402-1409

2015

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Handbook of Ceramics Grinding and Polishing

Toshiro Doi, Eckart Uhlmann, Ioan D. Marinescu

2, 2015

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Effect of bisphosphonates or teriparatide on mechanical complications after posterior instrumented fusion for osteoporotic vertebral fracture: a multi-center retrospective study

BMC musculoskeletal disorders, 2020-07, Vol.21 (1), p.420-10, Article 420

2020

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Surgical outcomes of spinal fusion for osteoporotic vertebral fracture in the thoracolumbar spine: Comprehensive evaluations of 5 typical surgical fusion techniques

Journal of orthopaedic science : official journal of the Japanese Orthopaedic Association, 2019-11, Vol.24 (6), p.1020-1026

2019

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Short- versus long-segment posterior spinal fusion with vertebroplasty for osteoporotic vertebral collapse with neurological impairment in thoracolumbar spine: a multicenter study

BMC musculoskeletal disorders, 2020-08, Vol.21 (1), p.513-513, Article 513

2020

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Surgical outcomes of spinal fusion for osteoporotic thoracolumbar vertebral fractures in patients with Parkinson's disease: what is the impact of Parkinson's disease on surgical outcome?

BMC musculoskeletal disorders, 2019-03, Vol.20 (1), p.103-103, Article 103

2019

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難加工次世代単結晶のための次世代型CMP加工技術: プラズマ/CMP同時融合加工の実用化に向けて

精密工学会誌, 2022/06/05, Vol.88(6), pp.435-439

2022

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Advances in CMP Polishing Technologies

Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa

1, 2011

Volltextzugriff (PDF)

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

International journal of automation technology, 2018-03, Vol.12 (2), p.187-198

2018

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Growth of thick GaN layers on laser-processed sapphire substrate by hydride vapor phase epitaxy

Journal of crystal growth, 2014-10, Vol.403, p.38-42

2014

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Novel Chemical Mechanical Polishing/Plasma-Chemical Vaporization Machining (CMP/P-CVM) Combined Processing of Hard-to-Process Crystals Based on Innovative Concepts

Sensors and materials, 2014, Vol.26 (6), p.403-415

2014

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Risk Factors for Proximal Junctional Fracture Following Fusion Surgery for Osteoporotic Vertebral Collapse with Delayed Neurological Deficits: A Retrospective Cohort Study of 403 Patients

Spine Surgery and Related Research, 2019/04/27, Vol.3(2), pp.171-177

2019

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The Surgical Outcomes of Spinal Fusion for Osteoporotic Vertebral Fractures in the Lower Lumbar Spine with a Neurological Deficit

Spine Surgery and Related Research, 2020/07/27, Vol.4(3), pp.199-207

2020

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Analysis of Subsurface Damage Structures of Gallium Nitride Substrates Induced by Mechanical Polishing with Diamond Abrasives

physica status solidi (b), 2024-07

2024

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Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices

1st ed., 2012

Volltextzugriff (PDF)

Dependence of GaN Removal Rate of Plasma Chemical Vaporization Machining on Mechanically Introduced Damage

Sensors and materials, 2014, Vol.26 (6), p.429-434

2014

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Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers

Japanese Journal of Applied Physics, 2012-05, Vol.51 (5), p.05EF05-05EF05-2

2012

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Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior

Japanese Journal of Applied Physics, 2012-05, Vol.51 (5), p.05EF03-05EF03-2

2012

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Next-Generation, Super-Hard-to-Process Substrates and Their High-Efficiency Machining Process Technologies Used to Create Innovative Devices

Analysis of mechanically induced subsurface damage and its removal by chemical mechanical polishing for gallium nitride substrate

Special Issue on Innovative SiC/GaN/Diamond Single-Crystal Substrates and Planarization Processing Technologies for the Next Generation ICT Society

Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Preparation and characterization of composite coatings containing a quaternary ammonium salt as an anti-static agent

Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

A hybrid chemical modification strategy for monocrystalline silicon micro-grinding: Experimental investigation and synergistic mechanism

Downregulation of PRRX1 Confers Cancer Stem Cell-Like Properties and Predicts Poor Prognosis in Hepatocellular Carcinoma

Handbook of Ceramics Grinding and Polishing

Effect of bisphosphonates or teriparatide on mechanical complications after posterior instrumented fusion for osteoporotic vertebral fracture: a multi-center retrospective study

Surgical outcomes of spinal fusion for osteoporotic vertebral fracture in the thoracolumbar spine: Comprehensive evaluations of 5 typical surgical fusion techniques

Short- versus long-segment posterior spinal fusion with vertebroplasty for osteoporotic vertebral collapse with neurological impairment in thoracolumbar spine: a multicenter study

Surgical outcomes of spinal fusion for osteoporotic thoracolumbar vertebral fractures in patients with Parkinson's disease: what is the impact of Parkinson's disease on surgical outcome?

難加工次世代単結晶のための次世代型CMP加工技術: プラズマ/CMP同時融合加工の実用化に向けて

Advances in CMP Polishing Technologies

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

Growth of thick GaN layers on laser-processed sapphire substrate by hydride vapor phase epitaxy

Novel Chemical Mechanical Polishing/Plasma-Chemical Vaporization Machining (CMP/P-CVM) Combined Processing of Hard-to-Process Crystals Based on Innovative Concepts

Risk Factors for Proximal Junctional Fracture Following Fusion Surgery for Osteoporotic Vertebral Collapse with Delayed Neurological Deficits: A Retrospective Cohort Study of 403 Patients

The Surgical Outcomes of Spinal Fusion for Osteoporotic Vertebral Fractures in the Lower Lumbar Spine with a Neurological Deficit

Analysis of Subsurface Damage Structures of Gallium Nitride Substrates Induced by Mechanical Polishing with Diamond Abrasives

Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices

Dependence of GaN Removal Rate of Plasma Chemical Vaporization Machining on Mechanically Introduced Damage

Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers

Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior

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