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Investigation of the Real Shape Changes of Round Thin-Film Membranes during the Bulge Testing

Technical physics, 2024-02, Vol.69 (2), p.192-200

2024

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Technique for Investigation of the Shape Changes of Wafers and Thin-Film Membranes by Using Geomorphometric Approaches

Technical physics, 2024-02, Vol.69 (2), p.181-191

2024

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Enhancement in NO2 sensing properties of SWNTs: A detailed analysis on functionalization of SWNTs with Z-Gly-OH

Journal of materials science. Materials in electronics, 2023, Vol.34 (2), p.102, Article 102

2023

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Technology for Manufacturing TSV Structures for the Creation of Silicon Interposers Using Temporary-Bonding Technology

Nanobiotechnology Reports (Online), 2024-04, Vol.19 (2), p.197-207

2024

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Study of the Dynamics of Heating Anode Units in a Maskless Nanolithograph Based on an Array of Microfocus X-Ray Tubes

Technical physics, 2024-02, Vol.69 (2), p.232-242

2024

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Measurement system for wide-range flow evaluation and thermal characterization of MEMS-based thermoresistive flow-rate sensors

Sensors and actuators. A. Physical., 2021-10, Vol.330, p.112832, Article 112832

2021

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Optimization of an Anode Membrane with a Transmission-Type Target in a System of Soft X-Ray Sources for X-Ray Nanolithography

Technical physics, 2020-11, Vol.65 (11), p.1709-1716

2020

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Experimental Determination of Mechanical Properties of the Anode Cell of an X-Ray Lithograph

Technical physics, 2020-11, Vol.65 (11), p.1755-1759

2020

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Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors

Russian microelectronics, 2019-12, Vol.48 (7), p.490-495

2019

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Analysis of Electron Emission from a Single Silicon Cathode to Quasi-Vacuum (Air) Using Atomic Force Microscopy

Technical physics, 2020-11, Vol.65 (11), p.1846-1852

2020

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Investigation of the emission properties of a silicon blade-type cathode

Journal of physics. Conference series, 2019-11, Vol.1400 (5), p.55011

2019

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Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Technical physics, 2019-12, Vol.64 (12), p.1742-1748

2019

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Y-Based Multilayer Mirrors for the Spectral Range of 8–12 nm

Bulletin of the Lebedev Physics Institute, 2021-12, Vol.48 (12), p.406-410

2021

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Non-destructive method of surface mapping to improve accuracy of mechanical stresses measurements

IOP conference series. Materials Science and Engineering, 2018-01, Vol.289 (1), p.12007

2018

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Development and study of a conceptual model of an X-ray source with a field emission cathode

Surface investigation, x-ray, synchrotron and neutron techniques, 2017-03, Vol.11 (2), p.443-448

2017

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Non-Contact Technique for Determining the Mechanical Stress in thin Films on Wafers by Profiler

IOP conference series. Materials Science and Engineering, 2017-04, Vol.189 (1), p.12019

2017

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Anisotropic magnetoresistive transducers on the basis of a self-aligned structure

Surface investigation, x-ray, synchrotron and neutron techniques, 2017-03, Vol.11 (2), p.343-345

2017

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Approaches to determining curvature of wafers by their topography

Physics Uspekhi, 2022-07, Vol.65 (7), p.706-722

2022

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Review of Existing Microassembly Methods

Nano- i mikrosistemnai͡a︡ tekhnika = Journal of "nano and microsystem technique.", 2022-06, Vol.23 (3), p.124-136

2022

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Magnetic-field sensors based on anisotropic magnetoresistive thin-film structures for operation in a wide temperature range

Semiconductors (Woodbury, N.Y.), 2015-12, Vol.49 (13), p.1739-1742

2015

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Specific features of observing magnetization inhomogeneities on the surface of permalloy thin films by means of highly sensitive magnetic-force-microscopy probes

Surface investigation, x-ray, synchrotron and neutron techniques, 2016, Vol.10 (1), p.39-42

2016

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Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2019, p.1-4

2019

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The Features of the Current-Voltage Characteristics of Field Emission Metal Cathode Covered by a Nanometer Oxide Layer

Solid state phenomena, 2016-03, Vol.247, p.47-53

2016

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Experimental determination of the energy dependence of electron inelastic mean free path in silicon oxide and silicon nitride

Surface investigation, x-ray, synchrotron and neutron techniques, 2016-07, Vol.10 (4), p.767-770

2016

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Influence of the magnetization-distribution nonuniformity on the sensitivity of anisotropic magnetoresistive sensors

Surface investigation, x-ray, synchrotron and neutron techniques, 2016-03, Vol.10 (2), p.307-311

2016

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Investigation of the Real Shape Changes of Round Thin-Film Membranes during the Bulge Testing

Technique for Investigation of the Shape Changes of Wafers and Thin-Film Membranes by Using Geomorphometric Approaches

Enhancement in NO2 sensing properties of SWNTs: A detailed analysis on functionalization of SWNTs with Z-Gly-OH

Technology for Manufacturing TSV Structures for the Creation of Silicon Interposers Using Temporary-Bonding Technology

Study of the Dynamics of Heating Anode Units in a Maskless Nanolithograph Based on an Array of Microfocus X-Ray Tubes

Measurement system for wide-range flow evaluation and thermal characterization of MEMS-based thermoresistive flow-rate sensors

Optimization of an Anode Membrane with a Transmission-Type Target in a System of Soft X-Ray Sources for X-Ray Nanolithography

Experimental Determination of Mechanical Properties of the Anode Cell of an X-Ray Lithograph

Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors

Analysis of Electron Emission from a Single Silicon Cathode to Quasi-Vacuum (Air) Using Atomic Force Microscopy

Investigation of the emission properties of a silicon blade-type cathode

Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Y-Based Multilayer Mirrors for the Spectral Range of 8–12 nm

Non-destructive method of surface mapping to improve accuracy of mechanical stresses measurements

Development and study of a conceptual model of an X-ray source with a field emission cathode

Non-Contact Technique for Determining the Mechanical Stress in thin Films on Wafers by Profiler

Anisotropic magnetoresistive transducers on the basis of a self-aligned structure

Approaches to determining curvature of wafers by their topography

Review of Existing Microassembly Methods

Magnetic-field sensors based on anisotropic magnetoresistive thin-film structures for operation in a wide temperature range

Specific features of observing magnetization inhomogeneities on the surface of permalloy thin films by means of highly sensitive magnetic-force-microscopy probes

Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

The Features of the Current-Voltage Characteristics of Field Emission Metal Cathode Covered by a Nanometer Oxide Layer

Experimental determination of the energy dependence of electron inelastic mean free path in silicon oxide and silicon nitride

Influence of the magnetization-distribution nonuniformity on the sensitivity of anisotropic magnetoresistive sensors

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