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Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Microelectronic engineering, 2000, Vol.50 (1), p.103-116

2000

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Ti/Co bilayers in salicide technology : electrical evaluation

Applied surface science, 1995-10, Vol.91, p.12-18

1995

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The Detrimental Effect of a Passivation on the Electromigration Lifetime of Narrow Al-Si-Cu Lines

MRS proceedings, 1995, Vol.391, Article 447

1995

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In situ emissivity measurements to probe the phase transformations during rapid thermal processing Co silicidation

Applied physics letters, 1992-11, Vol.61 (19), p.2296-2298

1992

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A manufacturable process to improve thermal stability of 0.25-μm cobalt silicided poly gate

IEEE transactions on semiconductor manufacturing, 1995-11, Vol.8 (4), p.449-451

1995

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Two-step anneals to avoid bridging during Co silicidation

Applied surface science, 1993-01, Vol.73, p.162-166

1993

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Thermal stability of CoSi2 on submicron polycrystalline silicon lines

Microelectronic engineering, 1992-09, Vol.19 (1-4), p.665-668

1992

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Formation of ultrathin CoSi2 films using a two-step limited reaction process

Journal of materials research, 1993-12, Vol.8 (12), p.3111-3121

1993

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Ti-W-N Deposition Stress as a Function of Microstructure

MRS proceedings, 1993, Vol.308, Article 51

1993

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On the formation of silicides on poly runners with topography by a two-step silicidation process

Applied surface science, 1995-10, Vol.91 (1), p.378-381

1995

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[formula omitted] bilayers in salicide technology: electrical evaluation

Applied surface science, 1995-10, Vol.91 (1), p.12-18

1995

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Diagnostic utility of the 40-hour TPI test

American journal of clinical pathology, 1961-06, Vol.35 (6), p.526-527

1961

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Stress Relaxation in Al-Si-Cu Thin Films and Lines

MRS proceedings, 1994, Vol.356, Article 441

1994

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A manufacturable process to improve thermal stability of 0.25-/spl mu/m cobalt silicided poly gate

IEEE transactions on semiconductor manufacturing, 1995-11, Vol.8 (4), p.449-451

1995

Volltextzugriff (PDF)

A manufacturable process to improve thermal stability of 0.25-mum cobalt silicided poly gate

IEEE transactions on semiconductor manufacturing, 1995-11, Vol.8 (4), p.449-451

1995

Volltextzugriff (PDF)

Thermal stability of CoSi sub(2) on submicron polycrystalline silicon lines

Microelectronic engineering, 1992-01, Vol.19 (1-4), p.665-668

1992

Volltextzugriff (PDF)

Thermal stability of CoSi 2 on submicron polycrystalline silicon lines

Microelectronic engineering, 1992, Vol.19 (1), p.665-668

1992

Volltextzugriff (PDF)

In situ emisivity measurements to probe the phase transformations during rapid thermal processing Co silicidation

Applied physics letters, 1992, Vol.61 (19), p.2296-2298

1992

Volltextzugriff (PDF)

COURSE OF THE SEROLOGIC REACTIONS IN RABBITS INOCULATED WITH DIFFERENT NUMBERS OF TREPONEMA PALLIDUM

American journal of clinical pathology, 1964-07, Vol.42 (1), p.33-36

1964

Volltextzugriff (PDF)

Formation of ultrathin CoSi 2 films using a two-step limited reaction process

Journal of materials research, 1993-12, Vol.8 (12), p.3111-3121

1993

Volltextzugriff (PDF)

Investigation of an in-situ probe for phase transformations during RTP silicidation

MRS proceedings, 1992, Vol.260, Article 145

1992

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Effect of Silicidation Schemes on Interface Contact Resistance

ESSDERC '94: 24th European Solid State Device Research Conference, 1994, p.283-286

1994

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Thermal Stability of CoSi2 on Submicron Polycrystalline Silicon Lines

ESSDERC '92: 22nd European Solid State Device Research conference, 1992, p.665-668

1992

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Screening for dysglycaemia in patients with coronary artery disease as reflected by fasting glucose, oral glucose tolerance test, and HbA1c: a report from EUROASPIRE IV--a survey from the European Society of Cardiology

European heart journal, 2015-05, Vol.36 (19), p.1171-1177

2015

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Patients with coronary artery disease and diabetes need improved management: a report from the EUROASPIRE IV survey: a registry from the EuroObservational Research Programme of the European Society of Cardiology

Cardiovascular diabetology, 2015-10, Vol.14 (1), p.133-133, Article 133

2015

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Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies

Ti/Co bilayers in salicide technology : electrical evaluation

The Detrimental Effect of a Passivation on the Electromigration Lifetime of Narrow Al-Si-Cu Lines

In situ emissivity measurements to probe the phase transformations during rapid thermal processing Co silicidation

A manufacturable process to improve thermal stability of 0.25-μm cobalt silicided poly gate

Two-step anneals to avoid bridging during Co silicidation

Thermal stability of CoSi2 on submicron polycrystalline silicon lines

Formation of ultrathin CoSi2 films using a two-step limited reaction process

Ti-W-N Deposition Stress as a Function of Microstructure

On the formation of silicides on poly runners with topography by a two-step silicidation process

[formula omitted] bilayers in salicide technology: electrical evaluation

Diagnostic utility of the 40-hour TPI test

Stress Relaxation in Al-Si-Cu Thin Films and Lines

A manufacturable process to improve thermal stability of 0.25-/spl mu/m cobalt silicided poly gate

A manufacturable process to improve thermal stability of 0.25-mum cobalt silicided poly gate

Thermal stability of CoSi sub(2) on submicron polycrystalline silicon lines

Thermal stability of CoSi 2 on submicron polycrystalline silicon lines

In situ emisivity measurements to probe the phase transformations during rapid thermal processing Co silicidation

COURSE OF THE SEROLOGIC REACTIONS IN RABBITS INOCULATED WITH DIFFERENT NUMBERS OF TREPONEMA PALLIDUM

Formation of ultrathin CoSi 2 films using a two-step limited reaction process

Investigation of an in-situ probe for phase transformations during RTP silicidation

Effect of Silicidation Schemes on Interface Contact Resistance

Thermal Stability of CoSi2 on Submicron Polycrystalline Silicon Lines

Screening for dysglycaemia in patients with coronary artery disease as reflected by fasting glucose, oral glucose tolerance test, and HbA1c: a report from EUROASPIRE IV--a survey from the European Society of Cardiology

Patients with coronary artery disease and diabetes need improved management: a report from the EUROASPIRE IV survey: a registry from the EuroObservational Research Programme of the European Society of Cardiology

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