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Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas

Physical review letters, 2011-12, Vol.107 (27), p.275001-275001, Article 275001

2011

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The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas

Journal of physics. D, Applied physics, 2018-09, Vol.51 (35), p.355204

2018

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The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Plasma sources science & technology, 2017-11, Vol.26 (12)

2017

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Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Journal of physics. D, Applied physics, 2021-06, Vol.54 (25), p.255202

2021

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Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon

Plasma sources science & technology, 2020-05, Vol.29 (5), p.55002

2020

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The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Plasma sources science & technology, 2015-02, Vol.24 (1), p.15019-13

2015

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The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas

Plasma sources science & technology, 2022-04, Vol.31 (4), p.45025

2022

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Simulation benchmarks for low-pressure plasmas: Capacitive discharges

Physics of plasmas, 2013-01, Vol.20 (1)

2013

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Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms

Plasma sources science & technology, 2020-07, Vol.29 (7), p.74001

2020

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Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Plasma sources science & technology, 2020-07, Vol.29 (7), p.75014

2020

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The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

Plasma sources science & technology, 2015-04, Vol.24 (2), p.24002-13

2015

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Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Plasma sources science & technology, 2015-05, Vol.24 (3), p.34002-14

2015

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Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

Plasma sources science & technology, 2016-06, Vol.25 (4)

2016

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Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Plasma sources science & technology, 2024-02, Vol.33 (2), p.25005

2024

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Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas

Plasma sources science & technology, 2019-03, Vol.28 (3), p.34002

2019

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Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results

Plasma sources science & technology, 2022-08, Vol.31 (8), p.85009

2022

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The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

Plasma sources science & technology, 2017-07, Vol.26 (8), p.85006

2017

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Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

Plasma sources science & technology, 2019-09, Vol.28 (9)

2019

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Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas

Plasma sources science & technology, 2023-11, Vol.32 (11), p.115003

2023

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Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Plasma sources science & technology, 2023-08, Vol.32 (8), p.85008

2023

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Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4 discharges

Plasma sources science & technology, 2011-08, Vol.20 (4), p.045008

2011

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Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

Plasma sources science & technology, 2015-08, Vol.24 (4), p.44009-18

2015

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A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas

Journal of physics. D, Applied physics, 2016-06, Vol.49 (23), p.234001-234006

2016

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Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Plasma physics and controlled fusion, 2012-12, Vol.54 (12), p.124003

2012

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Experimental and kinetic simulation studies of radio-frequency and direct-current breakdown in synthetic air

Journal of physics. D, Applied physics, 2014-11, Vol.47 (47), p.475202-9

2014

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Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas

The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas

The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon

The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas

Simulation benchmarks for low-pressure plasmas: Capacitive discharges

Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas

Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results

The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas

Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4 discharges

Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Experimental and kinetic simulation studies of radio-frequency and direct-current breakdown in synthetic air

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