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Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

Materials science & engineering. A, Structural materials : properties, microstructure and processing, 2006-11, Vol.435, p.453-459

2006

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Nanoscratch-induced phase transformation of monocrystalline Si

Scripta materialia, 2010-10, Vol.63 (8), p.847-850

2010

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Widely Tunable MEMS-Based Fabry-Perot Filter

Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.905-913

2009

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Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

IEEE electron device letters, 2005-12, Vol.26 (12), p.888-890

2005

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Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films

Journal of microelectromechanical systems, 2007-06, Vol.16 (3), p.622-627

2007

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Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures

Materials science & engineering. B, Solid-state materials for advanced technology, 2009-06, Vol.163 (1), p.26-30

2009

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Interpretation of current flow in photodiode structures using laser beam-induced current for characterization and diagnostics

IEEE transactions on electron devices, 2006-01, Vol.53 (1), p.23-31

2006

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Characterization of electrically active defects in photovoltaic detector arrays using laser beam-induced current

IEEE transactions on electron devices, 2005-10, Vol.52 (10), p.2163-2174

2005

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Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detector

IEEE journal of selected topics in quantum electronics, 2008-07, Vol.14 (4), p.1031-1041

2008

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Optical characterization of Fabry-Pe´rot MEMS filters integrated on tunable short-wave IR detectors

IEEE photonics technology letters, 2006-05, Vol.18 (9), p.1079

2006

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Evaluation of plasma deposited silicon nitride thin films for microsystems technology

Journal of microelectromechanical systems, 2005-10, Vol.14 (5), p.971-977

2005

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Investigation of ICPECVD Silicon Nitride Films for HgCdTe Surface Passivation

Journal of electronic materials, 2015-09, Vol.44 (9), p.2990-3001

2015

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High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors

MRS proceedings, 2014, Vol.1659 (1), p.9-14

2014

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Modelling of damping characteristics in silicon-gold bilayer cantilevers

2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2018, p.5-6

2018

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Long-term environmental stability of residual stress of SiN x , SiO x , and Ge thin films prepared at low temperatures

Materials science & engineering. B, Solid-state materials for advanced technology, 2009, Vol.163 (1), p.26-30

2009

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Electron magnetoresistance mobility in silicon-on-insulator layers using Kelvin’s technique

Solid-state electronics, 2010-09, Vol.54 (9), p.1047-1050

2010

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Characterization of mechanical, optical and structural properties of bismuth oxide thin films as a write-once medium for blue laser recording

MRS proceedings, 2014, Vol.1633 (1), p.87-92

2014

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Nanoindentation of HgCdTe prepared by molecular beam epitaxy

Applied physics letters, 2005-12, Vol.87 (25), p.251905-251905-3

2005

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Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Journal of electronic materials, 2008-12, Vol.37 (12), p.1811-1820

2008

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A WDM Capable Integrated Optical Readout of a MEMS Sensor

Procedia engineering, 2012, Vol.47, p.386-389

2012

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Environmental stability and cryogenic thermal cycling of low-temperature plasma-deposited silicon nitride thin films

Journal of applied physics, 2006-03, Vol.99 (5), p.053519-053519-9

2006

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Investigation of 1/f noise mechanisms in midwave infrared HgCdTe gated photodiodes

Journal of electronic materials, 2007-08, Vol.36 (8), p.884-889

2007

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Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films

Journal of applied physics, 2005-08, Vol.98 (4), p.044904-044904-6

2005

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Contribution of hole trap to persistent photoconductivity in n -type GaN

Journal of applied physics, 2004-07, Vol.96 (2), p.1019-1023

2004

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Effect of high-density plasma process parameters on carrier transport properties in p-to-n type converted Hg0.7Cd0.3Te layer

Journal of electronic materials, 2007-08, Vol.36 (8), p.913-918

2007

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Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

Nanoscratch-induced phase transformation of monocrystalline Si

Widely Tunable MEMS-Based Fabry-Perot Filter

Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films

Long-term environmental stability of residual stress of SiNx, SiOx, and Ge thin films prepared at low temperatures

Interpretation of current flow in photodiode structures using laser beam-induced current for characterization and diagnostics

Characterization of electrically active defects in photovoltaic detector arrays using laser beam-induced current

Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detector

Optical characterization of Fabry-Pe´rot MEMS filters integrated on tunable short-wave IR detectors

Evaluation of plasma deposited silicon nitride thin films for microsystems technology

Investigation of ICPECVD Silicon Nitride Films for HgCdTe Surface Passivation

High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors

Modelling of damping characteristics in silicon-gold bilayer cantilevers

Long-term environmental stability of residual stress of SiN x , SiO x , and Ge thin films prepared at low temperatures

Electron magnetoresistance mobility in silicon-on-insulator layers using Kelvin’s technique

Characterization of mechanical, optical and structural properties of bismuth oxide thin films as a write-once medium for blue laser recording

Nanoindentation of HgCdTe prepared by molecular beam epitaxy

Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

A WDM Capable Integrated Optical Readout of a MEMS Sensor

Environmental stability and cryogenic thermal cycling of low-temperature plasma-deposited silicon nitride thin films

Investigation of 1/f noise mechanisms in midwave infrared HgCdTe gated photodiodes

Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films

Contribution of hole trap to persistent photoconductivity in n -type GaN

Effect of high-density plasma process parameters on carrier transport properties in p-to-n type converted Hg0.7Cd0.3Te layer

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