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Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50 °C

Scientific reports, 2018-01, Vol.8 (1), p.1886-12, Article 1886

2018

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Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents

Chemical communications (Cambridge, England), 2015-11, Vol.51 (86), p.15692-15695

2015

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Switching mechanism in two-terminal vanadium dioxide devices

Nanotechnology, 2015-04, Vol.26 (16), p.165202-165202

2015

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Tuning the Fermi Level of SiO2-Supported Single-Layer Graphene by Thermal Annealing

Journal of physical chemistry. C, 2010-04, Vol.114 (15), p.6894-6900

2010

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Paramagnetic Intrinsic Defects in Polycrystalline Large-Area 2D MoS2 Films Grown on SiO2 by Mo Sulfurization

Nanoscale research letters, 2017-04, Vol.12 (1), p.283-283, Article 283

2017

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Enhancing dielectric passivation on monolayer WS2 via a sacrificial graphene oxide seeding layer

NPJ 2D materials and applications, 2024-03, Vol.8 (1), p.25-11, Article 25

2024

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Deposition of HfO2 on germanium and the impact of surface pretreatments

Applied physics letters, 2004-10, Vol.85 (17), p.3824-3826

2004

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Passivation and interface state density of SiO2/HfO2-based/polycrystalline-Si gate stacks

Applied physics letters, 2003-07, Vol.83 (3), p.533-535

2003

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Estimation of fixed charge densities in hafnium-silicate gate dielectrics

IEEE transactions on electron devices, 2006-10, Vol.53 (10), p.2627-2633

2006

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Towards an understanding and control of cavitation activity in 1 MHz ultrasound fields

Ultrasonics sonochemistry, 2013, Vol.20 (1), p.77-88

2013

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Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

Journal of non-crystalline solids, 2002-05, Vol.303 (1), p.83-87

2002

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Prevalence of pancreatic exocrine insufficiency after pancreatic surgery measured by 13C mixed triglyceride breath test: A prospective cohort study

Pancreatology : official journal of the International Association of Pancreatology (IAP) ... [et al.], 2023-08, Vol.23 (5), p.563-568

2023

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The preperitoneal memory-ring patch for inguinal hernia: a prospective multicentric feasibility study

Hernia : the journal of hernias and abdominal wall surgery, 2009-06, Vol.13 (3), p.243-249

2009

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Metal gate work function tuning by Al incorporation in TiN

Journal of applied physics, 2014-02, Vol.115 (7)

2014

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Nanoscale Etching and Reoxidation of InAs

Solid state phenomena, 2014-09, Vol.219, p.56-58

2014

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Influence of thickness scaling on the electronic structure and optical properties of oxygen deficient BaBiO3-δ thin films grown on SrTiO3-buffered Si(001) substrate

APL materials, 2024-03, Vol.12 (3), p.031105-031105-7

2024

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Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Applied physics letters, 2017-01, Vol.110 (1)

2017

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Improving mechanical robustness of ultralow- k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

Journal of applied physics, 2010-05, Vol.107 (10), p.104122-104122-7

2010

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NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration

Solid-state electronics, 2019-05, Vol.155, p.7-19

2019

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A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions

Journal of the Electrochemical Society, 2000-03, Vol.147 (3), p.1124

2000

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Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications

ECS journal of solid state science and technology, 2020-12, Vol.9 (12), p.123011

2020

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Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high- k oxides by attenuated total reflectance infrared spectroscopy

Applied surface science, 2009-06, Vol.255 (17), p.7812-7817

2009

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Damage free integration of ultralow-k dielectrics by template replacement approach

Applied physics letters, 2015-08, Vol.107 (9)

2015

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Bubble size distribution analysis and control in high frequency ultrasonic cleaning processes

IOP conference series. Materials Science and Engineering, 2012-12, Vol.42 (1), p.12016-4

2012

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Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation

Ultrasonics sonochemistry, 2013-01, Vol.20 (1), p.69-76

2013

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Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50 °C

Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents

Switching mechanism in two-terminal vanadium dioxide devices

Tuning the Fermi Level of SiO2-Supported Single-Layer Graphene by Thermal Annealing

Paramagnetic Intrinsic Defects in Polycrystalline Large-Area 2D MoS2 Films Grown on SiO2 by Mo Sulfurization

Enhancing dielectric passivation on monolayer WS2 via a sacrificial graphene oxide seeding layer

Deposition of HfO2 on germanium and the impact of surface pretreatments

Passivation and interface state density of SiO2/HfO2-based/polycrystalline-Si gate stacks

Estimation of fixed charge densities in hafnium-silicate gate dielectrics

Towards an understanding and control of cavitation activity in 1 MHz ultrasound fields

Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

Prevalence of pancreatic exocrine insufficiency after pancreatic surgery measured by 13C mixed triglyceride breath test: A prospective cohort study

The preperitoneal memory-ring patch for inguinal hernia: a prospective multicentric feasibility study

Metal gate work function tuning by Al incorporation in TiN

Nanoscale Etching and Reoxidation of InAs

Influence of thickness scaling on the electronic structure and optical properties of oxygen deficient BaBiO3-δ thin films grown on SrTiO3-buffered Si(001) substrate

Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Improving mechanical robustness of ultralow- k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration

A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions

Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications

Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high- k oxides by attenuated total reflectance infrared spectroscopy

Damage free integration of ultralow-k dielectrics by template replacement approach

Bubble size distribution analysis and control in high frequency ultrasonic cleaning processes

Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation

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