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Journal of micromechanics and microengineering, 2013-10, Vol.23 (10), p.105009-8
2013
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Sensors and actuators. B, Chemical, 2015-03, Vol.209, p.1049-1056
2015
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Journal of applied physics, 2010-10, Vol.108 (8), p.084323-084323-5
2010
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Journal of the European Ceramic Society, 2017-12, Vol.37 (16), p.5315-5320
2017
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The Journal of physics and chemistry of solids, 2010-02, Vol.71 (2), p.80-83
2010
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RSC advances, 2014-01, Vol.4 (97), p.54847-54853
2014
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Optics express, 2007-05, Vol.15 (11), p.6900-6907
2007
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Sensors and actuators. A. Physical., 2008-03, Vol.142 (1), p.160-165
2008
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Journal of micromechanics and microengineering, 2012-07, Vol.22 (7), p.74005-7
2012
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Microelectronic engineering, 2010-02, Vol.87 (2), p.163-166
2010
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Sensors and actuators. B, Chemical, 2011-08, Vol.156 (2), p.510-516
2011
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Sensors and actuators. B, Chemical, 2003-10, Vol.94 (3), p.330-336
2003
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Journal of micromechanics and microengineering, 2007-08, Vol.17 (8), p.N52-N57
2007
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Microelectronic engineering, 2004-06, Vol.73-74, p.689-694
2004
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Microelectronic engineering, 2004-06, Vol.73, p.689-694
2004
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Proceedings of IEEE Sensors, 2004, 2004, p.111-114 vol.1
2004
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Sensors and actuators. A, Physical, 1998-06, Vol.68 (1), p.435-441
1998
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2015 IEEE SENSORS, 2015, p.1-4
2015
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Journal of micromechanics and microengineering, 1999-06, Vol.9 (2), p.173-175
1999
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2015 30th Symposium on Microelectronics Technology and Devices (SBMicro), 2015, p.1-4
2015
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MRS proceedings, 2010, Vol.1258 (1), Article 1258-R10-15
2010
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Procedia chemistry, 2009-09, Vol.1 (1), p.963-966
2009
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2012 IEEE/MTT-S International Microwave Symposium Digest, 2012, p.1-3
2012
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Sensors and actuators. B, Chemical, 2006-10, Vol.118 (1), p.368-373
2006
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Journal of micromechanics and microengineering, 1997-09, Vol.7 (3), p.118-120, Article 118
1997
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