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Achieving atomistic control in materials processing by plasma-surface interactions

Journal of physics. D, Applied physics, 2017-06, Vol.50 (25), p.253001

2017

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Physical and chemical effects in directional atomic layer etching

Journal of physics. D, Applied physics, 2020-04, Vol.53 (18), p.183001

2020

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Enhancement of voltage-controlled magnetic anisotropy through precise control of Mg insertion thickness at CoFeB|MgO interface

Applied physics letters, 2017-01, Vol.110 (5)

2017

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Active Layer-Incorporated, Spectrally Tuned Au/SiO2 Core/Shell Nanorod-Based Light Trapping for Organic Photovoltaics

ACS nano, 2013-05, Vol.7 (5), p.3815-3822

2013

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Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation

Journal of physical chemistry. C, 2021-01, Vol.125 (3), p.1819-1832

2021

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Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition

Chemistry of materials, 2015-11, Vol.27 (21), p.7282-7288

2015

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Underlayer effect on the soft magnetic, high frequency, and magnetostrictive properties of FeGa thin films

Journal of applied physics, 2020-07, Vol.128 (1)

2020

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Perspectives in nanoscale plasma etching: what are the ultimate limits?

Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174011

2011

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Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?

Japanese Journal of Applied Physics, 2017-06, Vol.56 (6S2), p.6

2017

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Luminescence of Nanocrystalline Erbium‐Doped Yttria

Advanced functional materials, 2009-03, Vol.19 (5), p.748-754

2009

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Multilayering FeGa with NiFe and Al2O3 to enhance the soft magnetic properties

Applied physics letters, 2023-08, Vol.123 (9)

2023

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Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers

Annual review of chemical and biomolecular engineering, 2012-07, Vol.3 (1), p.235-262

2012

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Dry etching in the presence of physisorption of neutrals at lower temperatures

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2)

2023

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Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition

ACS applied materials & interfaces, 2017-10, Vol.9 (42), p.36980-36988

2017

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Atomic layer deposition of YMnO3 thin films

Journal of magnetism and magnetic materials, 2020-03, Vol.498, p.166146, Article 166146

2020

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Synthesis and Crystallization of Atomic Layer Deposition β‑Eucryptite LiAlSiO4 Thin-Film Solid Electrolytes

ACS applied materials & interfaces, 2020-12, Vol.12 (51), p.56935-56942

2020

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A Lamb wave magnetoelectric antenna design for implantable devices

Applied physics letters, 2023-05, Vol.122 (20)

2023

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Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-09, Vol.35 (5)

2017

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High-Quality White Light Using Core–Shell RE3+:LaPO4 (RE = Eu, Tb, Dy, Ce) Phosphors

Journal of physical chemistry. C, 2012-06, Vol.116 (23), p.12854-12860

2012

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Review Article: Plasma–surface interactions at the atomic scale for patterning metals

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2017-09, Vol.35 (5)

2017

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Tuning static and dynamic properties of FeGa/NiFe heterostructures

Applied physics letters, 2017-06, Vol.110 (24)

2017

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Enhanced voltage-controlled magnetic anisotropy in magnetic tunnel junctions with an MgO/PZT/MgO tunnel barrier

Applied physics letters, 2016-03, Vol.108 (11)

2016

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Magnetic state switching in FeGa microstructures

Smart materials and structures, 2022-03, Vol.31 (3), p.35005

2022

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Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO 4 Thin-Film Solid Electrolytes

ACS applied materials & interfaces, 2020-12, Vol.12 (51), p.56935-56942

2020

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Enhancing the soft magnetic properties of FeGa with a non-magnetic underlayer for microwave applications

Applied physics letters, 2020-06, Vol.116 (22)

2020

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Achieving atomistic control in materials processing by plasma-surface interactions

Physical and chemical effects in directional atomic layer etching

Enhancement of voltage-controlled magnetic anisotropy through precise control of Mg insertion thickness at CoFeB|MgO interface

Active Layer-Incorporated, Spectrally Tuned Au/SiO2 Core/Shell Nanorod-Based Light Trapping for Organic Photovoltaics

Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation

Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition

Underlayer effect on the soft magnetic, high frequency, and magnetostrictive properties of FeGa thin films

Perspectives in nanoscale plasma etching: what are the ultimate limits?

Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?

Luminescence of Nanocrystalline Erbium‐Doped Yttria

Multilayering FeGa with NiFe and Al2O3 to enhance the soft magnetic properties

Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers

Dry etching in the presence of physisorption of neutrals at lower temperatures

Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition

Atomic layer deposition of YMnO3 thin films

Synthesis and Crystallization of Atomic Layer Deposition β‑Eucryptite LiAlSiO4 Thin-Film Solid Electrolytes

A Lamb wave magnetoelectric antenna design for implantable devices

Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

High-Quality White Light Using Core–Shell RE3+:LaPO4 (RE = Eu, Tb, Dy, Ce) Phosphors

Review Article: Plasma–surface interactions at the atomic scale for patterning metals

Tuning static and dynamic properties of FeGa/NiFe heterostructures

Enhanced voltage-controlled magnetic anisotropy in magnetic tunnel junctions with an MgO/PZT/MgO tunnel barrier

Magnetic state switching in FeGa microstructures

Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO 4 Thin-Film Solid Electrolytes

Enhancing the soft magnetic properties of FeGa with a non-magnetic underlayer for microwave applications

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