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Analysis of the transmission spectrum of the flat-cutoff sensors on wafers with metal layer

Journal of applied physics, 2023-04, Vol.133 (15)

2023

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Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor

Applied physics letters, 2023-03, Vol.122 (11)

2023

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Analysis of the transmission spectrum of the microwave cutoff probe influenced by the sheath around the probe

Journal of applied physics, 2023-05, Vol.133 (18)

2023

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Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry

Applied physics letters, 2023-12, Vol.123 (23)

2023

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Computational Study on Transmission Spectra Considering Coaxial Cable of Cutoff Probes

Applied Science and Convergence Technology, 2024-03, Vol.33 (2), p.41-44

2024

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Effect of probe structure on wave transmission spectra of microwave cutoff probe

Journal of applied physics, 2024-08, Vol.136 (8)

2024

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Influence of plasma parameters on low-k SiCOH film grown by plasma-enhanced chemical vapor deposition using dimethyldimethoxysilane

Vacuum, 2023-11, Vol.217, p.112529, Article 112529

2023

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Effect of impurities in vacuum vessels on the plasma parameters in inductive discharges

Vacuum, 2023-09, Vol.215, p.112330, Article 112330

2023

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Computational Study of the Electrical Conductivity of the Antenna on the Transmission Spectra of the Flat Cutoff Sensor

Applied Science and Convergence Technology, 2024-07, Vol.33 (4), p.80-82

2024

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Effect of radiofrequency bias power on transmission spectrum of flat-cutoff sensor in inductively coupled plasma

Physics of plasmas, 2024-09, Vol.31 (9)

2024

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A Evaluation of Direct Payment on Agricultural Income effect using Farm Manager Registration Information

Journal of the Korea Academia-Industrial cooperation Society, 2016-05, Vol.17 (5), p.195-202

2016

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Investigating the Effect of Plasma Parameters on the Dielectric Constant of Sicoh Thin Films Grown by PECVD Using Dimethyldimethoxysilane

Meeting abstracts (Electrochemical Society), 2023-12, Vol.MA2023-02 (16), p.1175-1175

2023

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Effect of Impurities in Vacuum Vessels on the Plasma Parameters in Inductive Discharges

SSRN Electronic Journal, 2023

2023

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Prognosis of Atrial Fibrillation Patients Undergoing PCI According to Anticoagulants and Antiplatelet Agents

Journal of clinical medicine, 2021-07, Vol.10 (15), p.3370

2021

Volltextzugriff (PDF)

Fit analysis of CAD-CAM custom abutment using micro-CT

Taehan Chikwa Poch'ol Hakhoe chi, 2016, Vol.54 (4), p.370

2016

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Si/Ge Double-Layered Nanotube Array as a Lithium Ion Battery Anode

ACS nano, 2012-01, Vol.6 (1), p.303-309

2012

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Analysis of the transmission spectrum of the flat-cutoff sensors on wafers with metal layer

Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor

Analysis of the transmission spectrum of the microwave cutoff probe influenced by the sheath around the probe

Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry

Computational Study on Transmission Spectra Considering Coaxial Cable of Cutoff Probes

Effect of probe structure on wave transmission spectra of microwave cutoff probe

Influence of plasma parameters on low-k SiCOH film grown by plasma-enhanced chemical vapor deposition using dimethyldimethoxysilane

Effect of impurities in vacuum vessels on the plasma parameters in inductive discharges

Computational Study of the Electrical Conductivity of the Antenna on the Transmission Spectra of the Flat Cutoff Sensor

Effect of radiofrequency bias power on transmission spectrum of flat-cutoff sensor in inductively coupled plasma

A Evaluation of Direct Payment on Agricultural Income effect using Farm Manager Registration Information

Investigating the Effect of Plasma Parameters on the Dielectric Constant of Sicoh Thin Films Grown by PECVD Using Dimethyldimethoxysilane

Effect of Impurities in Vacuum Vessels on the Plasma Parameters in Inductive Discharges

Prognosis of Atrial Fibrillation Patients Undergoing PCI According to Anticoagulants and Antiplatelet Agents

Fit analysis of CAD-CAM custom abutment using micro-CT

Si/Ge Double-Layered Nanotube Array as a Lithium Ion Battery Anode

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