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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-11, Vol.22 (6), p.3306-3311
2004
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Microelectronic engineering, 2005-03, Vol.78, p.633-640
2005
Volltextzugriff (PDF)
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- Condensed Matter Physics
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- Nanoscience & Nanotechnology
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Zeitschrift / Serie
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures Processing, Measurement, And Phenomena
- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures
- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
- Microelectronic Engineering