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Low Power Electromagnetic Scanning Micromirror for LiDAR System

IEEE sensors journal, 2021-03, Vol.21 (6), p.7358-7366

2021

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Electromagnetic 2D Scanning Micromirror for High Definition Laser Projection Displays

IEEE photonics technology letters, 2018-12, Vol.30 (23), p.2072-2075

2018

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Electromagnetic biaxial vector scanner using radial magnetic field

Optics express, 2016-07, Vol.24 (14), p.15813-15821

2016

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Electromagnetic biaxial microscanner with mechanical amplification at resonance

Optics express, 2015-06, Vol.23 (13), p.16792-16802

2015

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Viable and high-throughput isolation of heterogeneous circulating tumor cells using tapered-slit filters

Sensors and actuators. B, Chemical, 2020-10, Vol.321, p.128369, Article 128369

2020

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A surface-tension driven micropump for low-voltage and low-power operations

Journal of microelectromechanical systems, 2002-10, Vol.11 (5), p.454-461

2002

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Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

Journal of microelectromechanical systems, 2007-08, Vol.16 (4), p.989-996

2007

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Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Journal of micromechanics and microengineering, 2005-11, Vol.15 (11), p.2098-2104

2005

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Performance of a raster scanning laser display system using diamond shaped frame supported micromirror

IEEE photonics technology letters, 2006-08, Vol.18 (16), p.1702-1704

2006

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Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

IEEE microwave and wireless components letters, 2005-04, Vol.15 (4), p.202-204

2005

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Speckle reduction in laser picoprojector by combining optical phase matrix with twin green lasers and oscillating MEMS mirror for coherence suppression

Japanese Journal of Applied Physics, 2016-08, Vol.55 (8S3), p.8-08RF03

2016

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Electrostatic MEMS variable optical attenuator with rotating folded micromirror

IEEE journal of selected topics in quantum electronics, 2004-05, Vol.10 (3), p.558-562

2004

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Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage

Sensors and actuators. A. Physical., 2007-03, Vol.135 (1), p.67-72

2007

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Ultra-compact, zero-power magnetic latching piezoelectric inchworm motor with integrated position sensor

Sensors and actuators. A. Physical., 2010-03, Vol.158 (2), p.306-312

2010

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A high-sag microlens array film with a full fill factor and its application to organic light emitting diodes

Journal of micromechanics and microengineering, 2008-06, Vol.18 (6), p.065003-065003 (6)

2008

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Fully integrated unequal Wilkinson power divider with EBG CPW

IEEE microwave and wireless components letters, 2003-07, Vol.13 (7), p.276-278

2003

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An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame

Journal of micromechanics and microengineering, 2006-05, Vol.16 (5), p.1033-1039

2006

Volltextzugriff (PDF)

Low-power consumption polymeric attenuator using a micromachined membrane-type waveguide

IEEE photonics technology letters, 2000-04, Vol.12 (4), p.407-409

2000

Volltextzugriff (PDF)

Large tilt angle electrostatic force actuated micro-mirror

IEEE photonics technology letters, 2002-11, Vol.14 (11), p.1569-1571

2002

Volltextzugriff (PDF)

Electromagnetic 2×2 MEMS optical switch

IEEE journal of selected topics in quantum electronics, 2004-05, Vol.10 (3), p.545

2004

Volltextzugriff (PDF)

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Applied physics letters, 2003-12, Vol.83 (23), p.4839-4841

2003

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A Micromachined Millimeter-Wave Cavity Resonator on Silicon and Quartz Substrates

Japanese Journal of Applied Physics, 2001-12, Vol.40 (12B), p.L1394

2001

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Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Sensors and actuators. A. Physical., 2007-03, Vol.134 (2), p.329-333

2007

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Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

Journal of micromechanics and microengineering, 2008-12, Vol.18 (12), p.125022-125022 (7)

2008

Volltextzugriff (PDF)

PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

Sensors and actuators. A, Physical, 2001-03, Vol.89 (1), p.166-173

2001

Volltextzugriff (PDF)

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Low Power Electromagnetic Scanning Micromirror for LiDAR System

Electromagnetic 2D Scanning Micromirror for High Definition Laser Projection Displays

Electromagnetic biaxial vector scanner using radial magnetic field

Electromagnetic biaxial microscanner with mechanical amplification at resonance

Viable and high-throughput isolation of heterogeneous circulating tumor cells using tapered-slit filters

A surface-tension driven micropump for low-voltage and low-power operations

Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Performance of a raster scanning laser display system using diamond shaped frame supported micromirror

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

Speckle reduction in laser picoprojector by combining optical phase matrix with twin green lasers and oscillating MEMS mirror for coherence suppression

Electrostatic MEMS variable optical attenuator with rotating folded micromirror

Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage

Ultra-compact, zero-power magnetic latching piezoelectric inchworm motor with integrated position sensor

A high-sag microlens array film with a full fill factor and its application to organic light emitting diodes

Fully integrated unequal Wilkinson power divider with EBG CPW

An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame

Low-power consumption polymeric attenuator using a micromachined membrane-type waveguide

Large tilt angle electrostatic force actuated micro-mirror

Electromagnetic 2×2 MEMS optical switch

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

A Micromachined Millimeter-Wave Cavity Resonator on Silicon and Quartz Substrates

Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

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