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The plasma–sheath transition in low temperature plasmas: on the existence of a collisionally modified Bohm criterion

Journal of physics. D, Applied physics, 2011-02, Vol.44 (4), p.042002-042002

Brinkmann, R P

2011

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Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Journal of physics. D, Applied physics, 2021-06, Vol.54 (25), p.255202

2021

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Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Plasma sources science & technology, 2020-07, Vol.29 (7), p.75014

2020

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The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

Plasma sources science & technology, 2015-04, Vol.24 (2), p.24002-13

2015

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Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge

Plasma sources science & technology, 2019-11, Vol.28 (11), p.115021

2019

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Stochastic heating in asymmetric capacitively coupled RF discharges

Journal of physics. D, Applied physics, 2008-10, Vol.41 (19), p.195212-195212 (16)

2008

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Enhancement of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: a theoretical approach

Physical review letters, 2008-08, Vol.101 (8), p.085004-085004, Article 085004

2008

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Minature Microwave Inductive Copuled Plasma as a Source of Atomic Oxygen for Plasma Deposition of Thin Films

2023 IEEE International Conference on Plasma Science (ICOPS), 2023, p.1-1

2023

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Electron dynamics in low pressure capacitively coupled radio frequency discharges

Journal of applied physics, 2020-05, Vol.127 (18)

2020

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Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

Journal of physics. D, Applied physics, 2008-05, Vol.41 (10), p.105214-105214 (15)

2008

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Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures

Journal of physics. D, Applied physics, 2008-02, Vol.41 (4), p.042003-042003 (5)

2008

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Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

Plasma sources science & technology, 2013-08, Vol.22 (4), p.45008-1-8

2013

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Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

Plasma sources science & technology, 2018-05, Vol.27 (5), p.55010

2018

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On plasma ion beam formation in the Advanced Plasma Source

Plasma sources science & technology, 2012-06, Vol.21 (3), p.35012-1-16

2012

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Influence of kinetic effects on the spectrum of a parallel electrode probe

Plasma sources science & technology, 2016-10, Vol.25 (6), p.65020

2016

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Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Plasma sources science & technology, 2023-04, Vol.32 (4), p.44007

2023

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Disparity between current and voltage driven capacitively coupled radio frequency discharges

Plasma sources science & technology, 2018-12, Vol.27 (12), p.125010

2018

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Active plasma resonance spectroscopy: eigenfunction solutions in spherical geometry

Plasma sources science & technology, 2014-12, Vol.23 (6), p.65025-10

2014

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Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Plasma sources science & technology, 2023-08, Vol.32 (8), p.85008

2023

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Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Plasma sources science & technology, 2023-04, Vol.32 (4), p.45008

2023

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Active plasma resonance spectroscopy: a kinetic functional analytic description

Plasma sources science & technology, 2014-08, Vol.23 (4), p.45006-14

2014

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Investigations of capacitively coupled neutral loop discharges (CCP-NLD) via PIC simulation

Journal of physics. D, Applied physics, 2007-01, Vol.40 (2), p.510-519, Article 510

2007

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A multi-component transport model for non-equilibrium low-temperature low-pressure plasmas

Journal of physics. D, Applied physics, 2006-04, Vol.39 (8), p.1606-1618

2006

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The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

Applied physics letters, 2008-08, Vol.93 (5)

2008

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Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

Plasma sources science & technology, 2023-04, Vol.32 (4), p.45009

2023

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The plasma–sheath transition in low temperature plasmas: on the existence of a collisionally modified Bohm criterion

Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges

Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge

Stochastic heating in asymmetric capacitively coupled RF discharges

Enhancement of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: a theoretical approach

Minature Microwave Inductive Copuled Plasma as a Source of Atomic Oxygen for Plasma Deposition of Thin Films

Electron dynamics in low pressure capacitively coupled radio frequency discharges

Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures

Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

On plasma ion beam formation in the Advanced Plasma Source

Influence of kinetic effects on the spectrum of a parallel electrode probe

Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Disparity between current and voltage driven capacitively coupled radio frequency discharges

Active plasma resonance spectroscopy: eigenfunction solutions in spherical geometry

Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Active plasma resonance spectroscopy: a kinetic functional analytic description

Investigations of capacitively coupled neutral loop discharges (CCP-NLD) via PIC simulation

A multi-component transport model for non-equilibrium low-temperature low-pressure plasmas

The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

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