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Radiation physics and chemistry (Oxford, England : 1993), 2007-02, Vol.76 (2), p.209-212
2007
Link zum Volltext
Journal of applied physics, 2005-02, Vol.97 (3)
2005
Link zum Volltext
Journal of applied physics, 2005-02, Vol.97 (3), p.034905-034905-6
2005
Link zum Volltext
Journal of applied physics, 2007-08, Vol.102 (3), p.033505-033505-9
2007
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Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing
2006
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Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2004, Vol.517 (1), p.389-398
- Marrone, S.
- Mastinu, P.F.
- Abbondanno, U.
- Baccomi, R.
- Marchi, E.Boscolo
- Bustreo, N.
- Colonna, N.
- Gramegna, F.
- Loriggiola, M.
- Marigo, S.
- Milazzo, P.M.
- Moreau, C.
- Sacchetti, M.
- Tagliente, G.
- Terlizzi, R.
- Vannini, G.
- Aerts, G.
- Berthomieux, E.
- Cano-Ott, D.
- Cennini, P.
- Domingo-Pardo, C.
- Ferrant, L.
- Gonzalez-Romero, E.
- Gunsing, F.
- Heil, M.
- Kaeppeler, F.
- Papaevangelou, T.
- Paradela, C.
- Pavlopoulos, P.
- Perrot, L.
- Plag, R.
- Tain, J.L.
- Wendler, H.
2004
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Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on, 2002, p.268-271
2002
- Link zum Volltext
Materials science in semiconductor processing, 2004, Vol.7 (4), p.325-330
2004
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MRS proceedings, 2004, Vol.812, p.153, Article F3.10
2004
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Thema
- Physical Sciences
- Physics
- Science & Technology
- Experimental Physics
- Experimentell Fysik
- Materials Science
- Physics, Applied
- Technology
- Annealing
- Sputtering
- Electric Conductivity
- Engineering
- Engineering, Electrical & Electronic
- Ion Beams
- Materials Science, Multidisciplinary
- Nuclear Science & Technology
- Physics, Condensed Matter
- Silicon
- Silicon Nitrides
- Thin Films
Kollektion
Zeitschrift / Serie
- Journal Of Applied Physics
- Applied Physics Letters
- Materials Research Society Symposium Proceedings
- Materials Science In Semiconductor Processing
- Materials, Technology And Reliability For Advanced Interconnects And Low-K Dielectrics-2004
- Mrs Proceedings
- Nuclear Instruments & Methods In Physics Research. Section A, Accelerators, Spectrometers, Detectors And Associated Equipment
- Radiation Physics And Chemistry