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Comparative study of the sidewall shape and proximity effect in bilayer electron beam resist systems

Journal of physics. Conference series, 2024-02, Vol.2710 (1), p.12011

2024

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Study and comparison of resist characteristics for different negative tone electron beam resists

Journal of physics. Conference series, 2023-02, Vol.2443 (1), p.12006

2023

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Optimisation criteria for the process electron beam lithography of negative AR-N7520 resists

Journal of physics. Conference series, 2023-02, Vol.2443 (1), p.12007

2023

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Comparative study of the sidewall shape and proximity effect of the AR-N 7520 negative electron beam resist

Journal of physics. Conference series, 2022-03, Vol.2240 (1), p.12050

2022

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PMMA resist profile and proximity effect dependence on the electron-beam lithography process parameters

Journal of physics. Conference series, 2020-04, Vol.1492 (1), p.12015

2020

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Experimental and theoretical study on chemically semi-amplified resist AR-P 6200

Journal of physics. Conference series, 2018-03, Vol.992 (1), p.12057

2018

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Study of the new CSAR62 positive tone electron-beam resist at 40 keV electron energy

Journal of physics. Conference series, 2016-03, Vol.700 (1), p.12030

2016

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Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing

Applied surface science, 2014-09, Vol.312, p.107-111

2014

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Standard AZ 5214E photoresist in laser interference and EBDW lithographies

Vacuum, 2015-01, Vol.111, p.5-8

2015

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Patterning of structures by e-beam lithography and ion etching for gas sensor applications

Journal of physics. Conference series, 2014-01, Vol.514 (1), p.12037-5

2014

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The effect of process parameters and annealing on the properties of Ti/Pt films for miniature temperature sensors

2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.85-88

2016

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Nonlinear Solubility Behavior of Polymer and Oligomer Resists at Electron Beam Modification

Journal of materials science and engineering. B, 2011-09, Vol.1 (4), p.523-529

2011

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Study of negative electron beam nanoresist HSQ on GaAs substrate

2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.133-136

2016

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Simple patterning method of sub-micro- and nanometer structures for gas sensor

2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.137-140

2016

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Estimation of exposure parameters of chosen e-beam resists using variable shaped e-beam pattern generator

The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems, 2012, p.287-290

2012

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Dynamic miRNA changes during the process of epileptogenesis in an infantile and adult-onset model

Scientific reports, 2021-05, Vol.11 (1), p.9649-9649, Article 9649

2021

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How to make DNA data storage more applicable

Trends in biotechnology (Regular ed.), 2024-01, Vol.42 (1), p.17-30

2024

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Comparative analysis of tear cytokines in patients with glaucoma, ocular hypertension, and healthy controls

International ophthalmology, 2023-10, Vol.43 (10), p.3559-3568

2023

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Modeling of shotgun sequencing of DNA plasmids using experimental and theoretical approaches

BMC bioinformatics, 2020-04, Vol.21 (1), p.132-132, Article 132

2020

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Population-Predicted MHC Class II Epitope Presentation of SARS-CoV-2 Structural Proteins Correlates to the Case Fatality Rates of COVID-19 in Different Countries

International journal of molecular sciences, 2021-03, Vol.22 (5), p.2630

2021

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Estimation of R0 for the spread of SARS-CoV-2 in Germany from excess mortality

Scientific reports, 2022-10, Vol.12 (1), p.17221-17221, Article 17221

2022

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Author Correction: Estimation of R0 for the spread of SARS-CoV-2 in Germany from excess mortality

Scientific reports, 2022-12, Vol.12 (1), p.22071-22071, Article 22071

2022

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Cat-E: A comprehensive web tool for exploring cancer targeting strategies

Computational and structural biotechnology journal, 2024-12, Vol.23, p.1376-1386

2024

Volltextzugriff (PDF)

Proteinnetzwerk-Analysen schnell gemacht mit PRO-Simat

Biospektrum, 2023-10, Vol.29 (6), p.633-636

2023

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Integrated structural and functional analysis of the protective effects of kinetin against oxidative stress in mammalian cellular systems

Scientific reports, 2020-08, Vol.10 (1), p.13330, Article 13330

2020

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Comparative study of the sidewall shape and proximity effect in bilayer electron beam resist systems

Study and comparison of resist characteristics for different negative tone electron beam resists

Optimisation criteria for the process electron beam lithography of negative AR-N7520 resists

Comparative study of the sidewall shape and proximity effect of the AR-N 7520 negative electron beam resist

PMMA resist profile and proximity effect dependence on the electron-beam lithography process parameters

Experimental and theoretical study on chemically semi-amplified resist AR-P 6200

Study of the new CSAR62 positive tone electron-beam resist at 40 keV electron energy

Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing

Standard AZ 5214E photoresist in laser interference and EBDW lithographies

Patterning of structures by e-beam lithography and ion etching for gas sensor applications

The effect of process parameters and annealing on the properties of Ti/Pt films for miniature temperature sensors

Nonlinear Solubility Behavior of Polymer and Oligomer Resists at Electron Beam Modification

Study of negative electron beam nanoresist HSQ on GaAs substrate

Simple patterning method of sub-micro- and nanometer structures for gas sensor

Estimation of exposure parameters of chosen e-beam resists using variable shaped e-beam pattern generator

Dynamic miRNA changes during the process of epileptogenesis in an infantile and adult-onset model

How to make DNA data storage more applicable

Comparative analysis of tear cytokines in patients with glaucoma, ocular hypertension, and healthy controls

Modeling of shotgun sequencing of DNA plasmids using experimental and theoretical approaches

Population-Predicted MHC Class II Epitope Presentation of SARS-CoV-2 Structural Proteins Correlates to the Case Fatality Rates of COVID-19 in Different Countries

Estimation of R0 for the spread of SARS-CoV-2 in Germany from excess mortality

Author Correction: Estimation of R0 for the spread of SARS-CoV-2 in Germany from excess mortality

Cat-E: A comprehensive web tool for exploring cancer targeting strategies

Proteinnetzwerk-Analysen schnell gemacht mit PRO-Simat

Integrated structural and functional analysis of the protective effects of kinetin against oxidative stress in mammalian cellular systems

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