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FOUP decontamination solutions to control AMCs in semiconductor fabs: Gas purge or wet cleaning?

Microelectronic engineering, 2018-07, Vol.194, p.19-24

2018

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Depth profiling investigation by pARXPS and MEIS of advanced transistor technology gate stack

Microelectronic engineering, 2017-02, Vol.169, p.24-28

2017

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High resolution nanotopography characterization at die scale of 28 nm FDSOI CMOS front-end CMP processes

Microelectronic engineering, 2014-01, Vol.113, p.105-108

2014

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Optical profilometry and AFM measurements comparison on low amplitude deterministic surfaces

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2019, p.1-4

2019

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IEEE_Xplore

Theoretical and Experimental Optical Spectroscopy Study of Hydrogen Adsorption at Si(111)-(7 x 7)

Physical review letters, 1996-06, Vol.76 (26), p.4923-4926

1996

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In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method

Journal of materials science. Materials in electronics, 2008-02, Vol.19 (2), p.115-118

2008

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Benefits of XPS nanocharacterization for process development and industrial control of thin SiGe channel layers in advanced CMOS technologies

Materials science in semiconductor processing, 2017-11, Vol.70, p.105-110

2017

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Adsorption kinetics of H on Si(111)7×7 by means of surface differential reflectivity

Physical review. B, 1997-08, Vol.56 (8), p.R4371-R4374

1997

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Comparison Of Several Metrology Techniques For In-line Process Monitoring Of Porous SiOCH

AIP conference proceedings, 2007, Vol.931 (1), p.362-366

2007

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Metrology and Optical Characterization of Plasma Enhanced Chemical Vapor Deposition, (PECVD), low temperature deposited Amorphous Carbon films

Frontiers of Characterization and Metrology for Nanoelectronics: 2007 (AIP Conference Proceedings Volume 931), 2007, Vol.931, p.99-104

2007

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High resolution nanotopography characterization at die scale of 28nm FDSOI CMOS front-end CMP processes

Microelectronic engineering, 2014-01, Vol.113, p.105-108

2014

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Formation and stability of small particles of potassium studied by real-time surface differential reflectance

Surface science, 1998-05, Vol.402, p.445-449

1998

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High resolution nanotopography characterization at die scale of 28 nm FDSOI CMOS front-end CMP processes

Microelectronic engineering, 2013, Vol.113, p.105-108

2013

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Optical spectroscopy study of hydrogenation of the Si(111)-7 × 7 surface

Applied surface science, 1996-09, Vol.104, p.158-162

1996

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Real-Time Investigation of Potassium Growth by Surface Differential Reflectance Spectroscopy

Physica status solidi. A, Applied research, 1998-12, Vol.170 (2), p.221-226

1998

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Formation and stability of small particles of potassium studied by real-time surface differential reflectance

Surface science, 1997-09, Vol.402-404 (1-3), p.445-449

1997

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Substrate-induced multipolar resonances in supported free-electron metal spheres

Physical review. B, Condensed matter, 1999, Vol.60 (8), p.6018-6022

1999

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1μm Pitch direct hybrid bonding with <300nm wafer-to-wafer overlay accuracy

2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2017, p.1-2

2017

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IEEE_Xplore

In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method

Journal of materials science. Materials in electronics, 2006

2006

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Comparative Study of the Adsorption of Oxygen and Hydrogen on Si(111)7×7 by Surface Differential Reflectance Spectroscopy

Physica status solidi. A, Applied research, 1999-09, Vol.175 (1), p.39-44

1999

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Formation and stability of small particles of potassium studied by real-time surface differential reflectance

Surface science, 1998, Vol.402-04, p.445-449

1998

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Multipolar plasma resonances in supported alkali-metal nanoparticles

Physica. B, Condensed matter, 2000-04, Vol.279 (1), p.25-28

2000

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Optical spectroscopy study of hydrogenation of the Si(111)-7 x 7 surface

Applied surface science, 1996, Vol.104-05, p.158-162

1996

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Accuracy and Safety of the Cytosponge for Assessing Histologic Activity in Eosinophilic Esophagitis: A Two-Center Study

The American journal of gastroenterology, 2017-10, Vol.112 (10), p.1538-1544

2017

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Accuracy of the Eosinophilic Esophagitis Endoscopic Reference Score in Diagnosis and Determining Response to Treatment

Clinical gastroenterology and hepatology, 2016-01, Vol.14 (1), p.31-39

2016

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FOUP decontamination solutions to control AMCs in semiconductor fabs: Gas purge or wet cleaning?

Depth profiling investigation by pARXPS and MEIS of advanced transistor technology gate stack

High resolution nanotopography characterization at die scale of 28 nm FDSOI CMOS front-end CMP processes

Optical profilometry and AFM measurements comparison on low amplitude deterministic surfaces

Theoretical and Experimental Optical Spectroscopy Study of Hydrogen Adsorption at Si(111)-(7 x 7)

In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method

Benefits of XPS nanocharacterization for process development and industrial control of thin SiGe channel layers in advanced CMOS technologies

Adsorption kinetics of H on Si(111)7×7 by means of surface differential reflectivity

Comparison Of Several Metrology Techniques For In-line Process Monitoring Of Porous SiOCH

Metrology and Optical Characterization of Plasma Enhanced Chemical Vapor Deposition, (PECVD), low temperature deposited Amorphous Carbon films

High resolution nanotopography characterization at die scale of 28nm FDSOI CMOS front-end CMP processes

Formation and stability of small particles of potassium studied by real-time surface differential reflectance

High resolution nanotopography characterization at die scale of 28 nm FDSOI CMOS front-end CMP processes

Optical spectroscopy study of hydrogenation of the Si(111)-7 × 7 surface

Real-Time Investigation of Potassium Growth by Surface Differential Reflectance Spectroscopy

Formation and stability of small particles of potassium studied by real-time surface differential reflectance

Substrate-induced multipolar resonances in supported free-electron metal spheres

1μm Pitch direct hybrid bonding with <300nm wafer-to-wafer overlay accuracy

In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method

Comparative Study of the Adsorption of Oxygen and Hydrogen on Si(111)7×7 by Surface Differential Reflectance Spectroscopy

Formation and stability of small particles of potassium studied by real-time surface differential reflectance

Multipolar plasma resonances in supported alkali-metal nanoparticles

Optical spectroscopy study of hydrogenation of the Si(111)-7 x 7 surface

Accuracy and Safety of the Cytosponge for Assessing Histologic Activity in Eosinophilic Esophagitis: A Two-Center Study

Accuracy of the Eosinophilic Esophagitis Endoscopic Reference Score in Diagnosis and Determining Response to Treatment

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