UB Paderborn / Katalog / Suche / in CDI

CMOS–MEMS resonators: From devices to applications

Microelectronic engineering, 2015-01, Vol.132, p.58-73

2015

Link zum Volltext

Verfügbarkeit prüfen

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

IEEE electron device letters, 2022-07, Vol.43 (7), p.1113-1116

2022

Link zum Volltext
IEEE_Xplore

Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation

Nonlinear dynamics, 2019-12, Vol.98 (4), p.3067-3094

2019

Link zum Volltext

Verfügbarkeit prüfen

Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay

Microelectronic engineering, 2018-05, Vol.192, p.44-51

2018

Link zum Volltext

Verfügbarkeit prüfen

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

Sensors and actuators. A. Physical., 2013-08, Vol.197, p.88-95

2013

Link zum Volltext

Verfügbarkeit prüfen

A monolithically integrated torsional CMOS-MEMS relay

Journal of micromechanics and microengineering, 2016-10, Vol.26 (11), p.115012

2016

Link zum Volltext

Verfügbarkeit prüfen

Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Applied physics letters, 2014-06, Vol.104 (24)

2014

Link zum Volltext

Verfügbarkeit prüfen

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

IEEE electron device letters, 2008-02, Vol.29 (2), p.146-148

2008

Link zum Volltext
IEEE_Xplore

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

Lab on a chip, 2011-01, Vol.11 (16), p.2670-2672

2011

Link zum Volltext

Verfügbarkeit prüfen

A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High- Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators

IEEE electron device letters, 2009-07, Vol.30 (7), p.718-720

2009

Link zum Volltext
IEEE_Xplore

Integration of NEMS resonators in a 65 nm CMOS technology

Microelectronic engineering, 2013-10, Vol.110, p.246-249

2013

Link zum Volltext

Verfügbarkeit prüfen

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

Journal of micromechanics and microengineering, 2009-01, Vol.19 (1), p.015002-015002 (10)

2009

Link zum Volltext

Verfügbarkeit prüfen

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

IEEE sensors journal, 2024-07, Vol.24 (13), p.21311-21320

2024

Link zum Volltext

Verfügbarkeit prüfen

Packaged CMOS-MEMS free-free beam oscillator

Journal of micromechanics and microengineering, 2013-11, Vol.23 (11), p.115018-10

2013

Link zum Volltext

Verfügbarkeit prüfen

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Applied physics letters, 2005-07, Vol.87 (4)

2005

Link zum Volltext

Verfügbarkeit prüfen

Integrated CMOS amplifier for ENG signal recording

IEEE transactions on biomedical engineering, 2004-12, Vol.51 (12), p.2188-2194

2004

Link zum Volltext
IEEE_Xplore

A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators

Journal of micromechanics and microengineering, 2012-05, Vol.22 (5), p.55020-6

2012

Link zum Volltext

Verfügbarkeit prüfen

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

IEEE electron device letters, 2006-06, Vol.27 (6), p.495-497

2006

Link zum Volltext
IEEE_Xplore

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Nanotechnology, 2001-06, Vol.12 (2), p.100-104

2001

Link zum Volltext

Verfügbarkeit prüfen

Monolithic single PMUT-on-CMOS ultrasound system with +17 dB SNR for Imaging Applications

IEEE access, 2020-01, Vol.8, p.1-1

2020

Link zum Volltext

Verfügbarkeit prüfen

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

Journal of microelectromechanical systems, 2005-06, Vol.14 (3), p.508-519

2005

Link zum Volltext
IEEE_Xplore

VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator

Electronics letters, 2012-04, Vol.48 (9), p.514-516

2012

Link zum Volltext

Verfügbarkeit prüfen

A 230 MHz CMOS-MEMS bulk acoustic wave resonator

Microelectronic engineering, 2012-10, Vol.98, p.458-462

2012

Link zum Volltext

Verfügbarkeit prüfen

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

IEEE transactions on circuits and systems. 2, Analog and digital signal processing, 2007-05, Vol.54 (5), p.377-381

2007

Link zum Volltext
IEEE_Xplore

Zero-level packaging of MEMS in standard CMOS technology

Journal of micromechanics and microengineering, 2010-06, Vol.20 (6), p.064009-064009

2010

Link zum Volltext

Verfügbarkeit prüfen

Menü

Weitere Dienste

Einstellungen

CMOS–MEMS resonators: From devices to applications

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation

Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

A monolithically integrated torsional CMOS-MEMS relay

Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High- Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators

Integration of NEMS resonators in a 65 nm CMOS technology

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Packaged CMOS-MEMS free-free beam oscillator

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Integrated CMOS amplifier for ENG signal recording

A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Monolithic single PMUT-on-CMOS ultrasound system with +17 dB SNR for Imaging Applications

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator

A 230 MHz CMOS-MEMS bulk acoustic wave resonator

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

Zero-level packaging of MEMS in standard CMOS technology

Suchergebnisse filtern