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Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy

Nanotechnology reviews (Berlin), 2024-02, Vol.13 (1), p.242-6

2024

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Development of large aperture projection scatterometry for catalyst loading evaluation in proton exchange membrane fuel cells

Journal of power sources, 2017-10, Vol.364 (C), p.130-137

2017

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Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization

Light, science & applications, 2016-02, Vol.5 (2), p.e16038-e16038

2016

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Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach

Applied Optics, 2012-09, Vol.51 (25), p.6196

2012

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Fourier domain optical tool normalization for quantitative parametric image reconstruction

Applied optics (2004), 2013-09, Vol.52 (26), p.6512

2013

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Combining model-based measurement results of critical dimensions from multiple tools

Measurement science & technology, 2017-06, Vol.28 (6), p.65002

2017

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Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Optics express, 2013-11, Vol.21 (22), p.26219-26226

2013

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Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

Optics letters, 2016-11, Vol.41 (21), p.4959-4962

2016

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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

Optik (Stuttgart), 2018-03, Vol.156, p.635-645

2018

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Scatterfield microscopy for extending the limits of image-based optical metrology

Applied Optics, 2007-07, Vol.46 (20), p.4248

2007

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Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Journal of micro/nanolithography, MEMS, and MOEMS, 2015-10, Vol.14 (4), p.44001

2015

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Data-driven approaches to optical patterned defect detection

OSA continuum, 2019-09, Vol.2 (9), p.2683-2693

2019

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Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures

Optics and lasers in engineering, 2022-05, Vol.152, p.106953, Article 106953

2022

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Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Journal of micro/nanolithography, MEMS, and MOEMS, 2017-10, Vol.16 (4), p.1

2017

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Zero-Order and Super-Resolved Imaging of Arrayed Nanoscale Lines using Scatterfield Microscopy

Frontiers of Characterization and Metrology for Nanoelectronics: 2007 (AIP Conference Proceedings Volume 931), 2007, Vol.931, p.397-401

2007

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Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

ECS transactions, 2019-07, Vol.92 (1), p.73-84

2019

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Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

Physical review applied, 2019-06, Vol.11 (6), Article 064056

2019

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Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

Journal of micro/nanolithography, MEMS, and MOEMS, 2015-01, Vol.14 (1), p.14001

2015

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Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy

Journal of micro/nanolithography, MEMS, and MOEMS, 2008-01, Vol.7 (1), p.13012

Patrick, Heather J.

2008

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Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Meeting abstracts (Electrochemical Society), 2019-09, Vol.MA2019-02 (13), p.899-899

2019

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Plasma Lipidomic Profiles Improve on Traditional Risk Factors for the Prediction of Cardiovascular Events in Type 2 Diabetes Mellitus

Circulation (New York, N.Y.), 2016-11, Vol.134 (21), p.1637-1650

2016

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Modulation of atmospheric rivers near Alaska and the U.S. West Coast by northeast Pacific height anomalies

Journal of geophysical research. Atmospheres, 2016-11, Vol.121 (21), p.12,751-12,765

2016

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International Union of Basic and Clinical Pharmacology. CX. Classification of Receptors for 5-hydroxytryptamine; Pharmacology and Function

Pharmacological reviews, 2021-01, Vol.73 (1), p.310-520

2021

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Risk for Infection in Humans after Exposure to Birds Infected with Highly Pathogenic Avian Influenza A(H5N1) Virus, United States, 2022

Emerging infectious diseases, 2023-06, Vol.29 (6), p.1215-1219

2023

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Comparison of three methods for the derivation of a biologic scaffold composed of adipose tissue extracellular matrix

Tissue engineering. Part C, Methods, 2011-04, Vol.17 (4), p.411-421

2011

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Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy

Development of large aperture projection scatterometry for catalyst loading evaluation in proton exchange membrane fuel cells

Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization

Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach

Fourier domain optical tool normalization for quantitative parametric image reconstruction

Combining model-based measurement results of critical dimensions from multiple tools

Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

Scatterfield microscopy for extending the limits of image-based optical metrology

Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Data-driven approaches to optical patterned defect detection

Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures

Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Zero-Order and Super-Resolved Imaging of Arrayed Nanoscale Lines using Scatterfield Microscopy

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Plasma Lipidomic Profiles Improve on Traditional Risk Factors for the Prediction of Cardiovascular Events in Type 2 Diabetes Mellitus

Modulation of atmospheric rivers near Alaska and the U.S. West Coast by northeast Pacific height anomalies

International Union of Basic and Clinical Pharmacology. CX. Classification of Receptors for 5-hydroxytryptamine; Pharmacology and Function

Risk for Infection in Humans after Exposure to Birds Infected with Highly Pathogenic Avian Influenza A(H5N1) Virus, United States, 2022

Comparison of three methods for the derivation of a biologic scaffold composed of adipose tissue extracellular matrix

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