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Physical processes in EUV sources for microlithography

Journal of physics. D, Applied physics, 2011-06, Vol.44 (25), p.253001

2011

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Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Journal of physics. D, Applied physics, 2016-03, Vol.49 (14), p.145203-145210

2016

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Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon

Journal of physics. D, Applied physics, 2015-07, Vol.48 (28), p.285203-8

2015

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The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas

Plasma sources science & technology, 2015-12, Vol.25 (1), p.15012

2015

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Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Optics letters, 2009-12, Vol.34 (23), p.3680

2009

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Ion energy distributions in highly transient EUV induced plasma in hydrogen

Journal of applied physics, 2018-02, Vol.123 (6)

2018

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Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy

Journal of physics. D, Applied physics, 2019-01, Vol.52 (3), p.34004

2019

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Dynamics of the spatial electron density distribution of EUV-induced plasmas

Journal of physics. D, Applied physics, 2015-11, Vol.48 (43), p.432001-432005

2015

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Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

Review of scientific instruments, 2018-04, Vol.89 (4)

2018

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An atomic hydrogen etching sensor for H2 plasma diagnostics

Review of scientific instruments, 2021-06, Vol.92 (6)

2021

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Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

Applied physics letters, 2019-04, Vol.114 (13)

2019

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Thermalization of electrons in decaying extreme ultraviolet photons induced low pressure argon plasma

Plasma sources science & technology, 2016-06, Vol.25 (3), p.35010-35017

2016

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Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study

Plasma sources science & technology, 2015-11, Vol.24 (6), p.65016

2015

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Lithography for now and the future

Solid-state electronics, 2019-05, Vol.155, p.20-26

2019

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Comparison of Extreme Ultraviolet Sources for Lithography Applications

Microelectronic engineering, 2000-06, Vol.53 (1), p.681-684

2000

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Time-resolved ion energy distribution functions in the afterglow of an EUV-induced plasma

Applied physics letters, 2019-10, Vol.115 (18)

2019

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Addendum: Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy (2018 J. Phys: D. Appl. Phys. 52 034004)

Journal of physics. D, Applied physics, 2020-08, Vol.53 (35), p.359401

2020

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Physical processes in EUV sources for microlithography

Journal of physics. D, Applied physics, 2011, Vol.44 (25)

2011

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EUV Lithography: Today and Tomorrow

Future Trends in Microelectronics, 2013, p.120-132

1, 2013

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Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma

Journal of applied physics, 2010-01, Vol.107 (1), p.013301-013301-7

2010

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Gated pinhole camera imaging of the high-energy ions emittedby a discharge produced Sn plasma for extreme ultraviolet generation

Journal of applied physics, 2009-10, Vol.106 (8), p.083301-083301-6

2009

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Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

Journal of applied physics, 2009-10, Vol.106 (8)

2009

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Insulin-like growth factors, their binding proteins, and transforming growth factor-beta 1 in oxidant-arrested lung alveolar epithelial cells

The Journal of biological chemistry, 1994-05, Vol.269 (19), p.14111-14117

1994

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Glucocorticoid-induced growth arrest of lung alveolar epithelial cells is associated with increased production of insulin-like growth factor binding protein-2

Endocrinology (Philadelphia), 1996-01, Vol.137 (1), p.287-295

1996

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Insulin-like growth factor-II (IGF-II), type 2 IGF receptor, and IGF-binding protein-2 gene expression in rat lung alveolar epithelial cells : relation to proliferation

Endocrinology (Philadelphia), 1994-07, Vol.135 (1), p.83-91

1994

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Physical processes in EUV sources for microlithography

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon

The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Ion energy distributions in highly transient EUV induced plasma in hydrogen

Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy

Dynamics of the spatial electron density distribution of EUV-induced plasmas

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

An atomic hydrogen etching sensor for H2 plasma diagnostics

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

Thermalization of electrons in decaying extreme ultraviolet photons induced low pressure argon plasma

Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study

Lithography for now and the future

Comparison of Extreme Ultraviolet Sources for Lithography Applications

Time-resolved ion energy distribution functions in the afterglow of an EUV-induced plasma

Addendum: Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using multi-mode microwave cavity resonance spectroscopy (2018 J. Phys: D. Appl. Phys. 52 034004)

Physical processes in EUV sources for microlithography

EUV Lithography: Today and Tomorrow

Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma

Gated pinhole camera imaging of the high-energy ions emittedby a discharge produced Sn plasma for extreme ultraviolet generation

Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

Insulin-like growth factors, their binding proteins, and transforming growth factor-beta 1 in oxidant-arrested lung alveolar epithelial cells

Glucocorticoid-induced growth arrest of lung alveolar epithelial cells is associated with increased production of insulin-like growth factor binding protein-2

Insulin-like growth factor-II (IGF-II), type 2 IGF receptor, and IGF-binding protein-2 gene expression in rat lung alveolar epithelial cells : relation to proliferation

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