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Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputtering

Thin solid films, 2023-03, Vol.769, p.139753, Article 139753

2023

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Nucleation retardation of cubic boron nitride films caused by the addition of oxygen in argon‑nitrogen sputtering gas

Diamond and related materials, 2021-12, Vol.120, p.108694, Article 108694

2021

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Structural and electrical properties of sputtered indium–zinc oxide thin films

Thin solid films, 2006-12, Vol.515 (4), p.1364-1369

2006

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Scattering mechanism of transparent conducting tin oxide films prepared by magnetron sputtering

Thin solid films, 2006-12, Vol.515 (4), p.2475-2480

2006

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Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method

Advanced engineering materials, 2016-07, Vol.18 (7), p.1123-1126

2016

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Variation of residual stress in cubic boron nitride film caused by hydrogen addition during unbalanced magnetron sputtering

Thin solid films, 2011-09, Vol.519 (22), p.7871-7874

2011

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Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter

Journal of the European Ceramic Society, 2005, Vol.25 (12), p.2161-2165

2005

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Oxidation behavior of amorphous boron carbide–silicon carbide nano-multilayer thin films

Surface & coatings technology, 2015-08, Vol.276, p.55-58

2015

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Effect of deposition temperature on the alignment of hexagonal laminates in turbostratic boron nitride thin film

Surface & coatings technology, 2014-03, Vol.242, p.29-33

2014

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The parameter space of hydrogen content added to Ar–nitrogen sputtering gas and substrate bias voltage for the formation of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Surface & coatings technology, 2013-05, Vol.223, p.75-78

2013

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Hydrogen in polycrystalline ZnO thin films

Journal of physics. D, Applied physics, 2010-09, Vol.43 (36), p.365406-365406

2010

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Insertion of nanocrystalline diamond film and the addition of hydrogen gas during deposition for adhesion improvement of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Thin solid films, 2013-05, Vol.534, p.380-383

2013

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Effect of Precursor Ratio on the Structural Properties of ZnO Thin Films Deposited by Low Pressure MOCVD

Journal of nanoscience and nanotechnology, 2012-04, Vol.12 (4), p.3669-3672

2012

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Effects of ZnO addition on electrical and structural properties of amorphous SnO2 thin films

Thin solid films, 2006-01, Vol.494 (1-2), p.42-46

2006

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Improvement of the thermal and chemical stability of Al doped ZnO films

Journal of electroceramics, 2006-12, Vol.17 (2-4), p.241-245

2006

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Fabrication of diamond nano-whiskers

Thin solid films, 2000-12, Vol.377, p.295-298

2000

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Optical analysis of doped ZnO thin films using nonparabolic conduction-band parameters

Journal of applied physics, 2012-06, Vol.111 (12)

2012

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Control of diamond micro-tip geometry for field emitter

Thin solid films, 2000-12, Vol.377, p.299-302

2000

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Mechanical analysis for crack-free release of chemical-vapor-deposited diamond wafers

Diamond and related materials, 2002-08, Vol.11 (8), p.1597-1605

2002

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Effects of microstructural evolution and intermetallic layer growth on shear strength of ball-grid-array Sn-Cu solder joints

Journal of electronic materials, 2001-10, Vol.30 (10), p.1323-1331

2001

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Characteristics of ZnO:Al thin films co-doped with hydrogen and fluorine

Applied surface science, 2010-06, Vol.256 (16), p.5102-5107

2010

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Emission characteristics of boron nitride coated carbon nanotubes

Physica. B, Condensed matter, 2002-10, Vol.323 (1), p.180-181

2002

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Large area deposition of thick diamond film by direct-current PACVD

Thin solid films, 1999-03, Vol.341 (1), p.202-206

1999

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Characteristics of carbon incorporated BN films deposited by radio frequency PACVD

Surface & coatings technology, 2000-11, Vol.133, p.473-477

2000

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Fabrication and emission properties of diode- and triode-type diamond field emitter array based on the transfer mold technique

Diamond and related materials, 1999, Vol.8 (1), p.89-93

1999

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Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputtering

Nucleation retardation of cubic boron nitride films caused by the addition of oxygen in argon‑nitrogen sputtering gas

Structural and electrical properties of sputtered indium–zinc oxide thin films

Scattering mechanism of transparent conducting tin oxide films prepared by magnetron sputtering

Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method

Variation of residual stress in cubic boron nitride film caused by hydrogen addition during unbalanced magnetron sputtering

Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter

Oxidation behavior of amorphous boron carbide–silicon carbide nano-multilayer thin films

Effect of deposition temperature on the alignment of hexagonal laminates in turbostratic boron nitride thin film

The parameter space of hydrogen content added to Ar–nitrogen sputtering gas and substrate bias voltage for the formation of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Hydrogen in polycrystalline ZnO thin films

Insertion of nanocrystalline diamond film and the addition of hydrogen gas during deposition for adhesion improvement of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Effect of Precursor Ratio on the Structural Properties of ZnO Thin Films Deposited by Low Pressure MOCVD

Effects of ZnO addition on electrical and structural properties of amorphous SnO2 thin films

Improvement of the thermal and chemical stability of Al doped ZnO films

Fabrication of diamond nano-whiskers

Optical analysis of doped ZnO thin films using nonparabolic conduction-band parameters

Control of diamond micro-tip geometry for field emitter

Mechanical analysis for crack-free release of chemical-vapor-deposited diamond wafers

Effects of microstructural evolution and intermetallic layer growth on shear strength of ball-grid-array Sn-Cu solder joints

Characteristics of ZnO:Al thin films co-doped with hydrogen and fluorine

Emission characteristics of boron nitride coated carbon nanotubes

Large area deposition of thick diamond film by direct-current PACVD

Characteristics of carbon incorporated BN films deposited by radio frequency PACVD

Fabrication and emission properties of diode- and triode-type diamond field emitter array based on the transfer mold technique

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