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Size effect on Young's modulus of thin chromium cantilevers

Applied physics letters, 2004-10, Vol.85 (16), p.3555-3557

2004

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Contact end resistance test structure applied for nanocontact measurements

Microelectronic engineering, 2012-11, Vol.99, p.18-22

2012

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Field-effect control of breakdown paths in HfO2 based MIM structures

Microelectronics and reliability, 2013-09, Vol.53 (9-11), p.1346-1350

2013

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Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

Journal of microelectromechanical systems, 2005-06, Vol.14 (3), p.508-519

2005

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Functional oxide nanostructures written by EBL on insulating single crystal substrates

Microelectronic engineering, 2013-10, Vol.110, p.94-99

2013

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Using electron and ion beams on carbon nanotube-based devices. Effects and considerations for nanofabrication

Microelectronic engineering, 2009-04, Vol.86 (4), p.892-894

2009

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Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Nanotechnology, 2014-04, Vol.25 (13), p.135302-9

2014

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Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Nanotechnology, 2018-04, Vol.29 (15), p.155303-155303

2018

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Batch wafer scale fabrication of passivated carbon nanotube transistors for electrochemical sensing applications

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2010-11, Vol.28 (6), p.C6-C6P5

2010

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Tailored Height Gradients in Vertical Nanowire Arrays via Mechanical and Electronic Modulation of Metal-Assisted Chemical Etching

Small (Weinheim an der Bergstrasse, Germany), 2015-09, Vol.11 (33), p.4201-4208

2015

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Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Applied physics letters, 2015-08, Vol.107 (7)

2015

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Au cylindrical nanocup: A geometrically, tunable optical nanoresonator

Applied physics letters, 2015-07, Vol.107 (3)

2015

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Determination of stress build-up during nanoimprint process in triangular polymer structures

Microelectronic engineering, 2008-05, Vol.85 (5-6), p.838-841

2008

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Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Nanotechnology, 2001-06, Vol.12 (2), p.100-104

2001

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Scanning near-field optical microscope for the characterization of optical integrated waveguides

Journal of lightwave technology, 2000-03, Vol.18 (3), p.370-374

2000

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Plasmonic Enhanced Photodetectors for Near Infra-red Light Detection

2020 43rd International Convention on Information, Communication and Electronic Technology (MIPRO), 2020, p.1876-1880

2020

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Light propagation studies on laser modified waveguides using scanning near-field optical microscopy

IEEE photonics technology letters, 2001-08, Vol.13 (8), p.809-811

2001

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Mass measurements based on nanomechanical devices: differential measurements

Journal of physics. Conference series, 2008-03, Vol.100 (5), p.052031

2008

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Dual Function Polyvinyl Alcohol Based Oxide Precursors for Nanoimprinting and Electron Beam Lithography

MRS proceedings, 2013, Vol.1547 (1), p.75-80

2013

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On the electromechanical modelling of a resonating nano-cantilever-based transducer

Ultramicroscopy, 2004-08, Vol.100 (3), p.225-232

2004

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Atomic force microscope characterization of a resonating nanocantilever

Ultramicroscopy, 2003-10, Vol.97 (1), p.127-133

2003

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Functional oxide nanostructures written by EBL on insulating single crystal substrates : Nanolithography 2012

Microelectronic engineering, 2013, Vol.110, p.94-99

2013

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Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-11, Vol.27 (6), p.2691-2697

2009

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Protein patterning on the micro- and nanoscale by thermal nanoimprint lithography on a new functionalized copolymer

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-11, Vol.27 (6), p.2439-2443

2009

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Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007, p.237-240

2007

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Size effect on Young's modulus of thin chromium cantilevers

Contact end resistance test structure applied for nanocontact measurements

Field-effect control of breakdown paths in HfO2 based MIM structures

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

Functional oxide nanostructures written by EBL on insulating single crystal substrates

Using electron and ion beams on carbon nanotube-based devices. Effects and considerations for nanofabrication

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Batch wafer scale fabrication of passivated carbon nanotube transistors for electrochemical sensing applications

Tailored Height Gradients in Vertical Nanowire Arrays via Mechanical and Electronic Modulation of Metal-Assisted Chemical Etching

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Au cylindrical nanocup: A geometrically, tunable optical nanoresonator

Determination of stress build-up during nanoimprint process in triangular polymer structures

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Scanning near-field optical microscope for the characterization of optical integrated waveguides

Plasmonic Enhanced Photodetectors for Near Infra-red Light Detection

Light propagation studies on laser modified waveguides using scanning near-field optical microscopy

Mass measurements based on nanomechanical devices: differential measurements

Dual Function Polyvinyl Alcohol Based Oxide Precursors for Nanoimprinting and Electron Beam Lithography

On the electromechanical modelling of a resonating nano-cantilever-based transducer

Atomic force microscope characterization of a resonating nanocantilever

Functional oxide nanostructures written by EBL on insulating single crystal substrates : Nanolithography 2012

Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Protein patterning on the micro- and nanoscale by thermal nanoimprint lithography on a new functionalized copolymer

Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

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