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Comparative study of the sidewall shape and proximity effect in bilayer electron beam resist systems
2024
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Journal of physics. Conference series, 2023-02, Vol.2443 (1), p.12006
2023
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Journal of physics. Conference series, 2023-02, Vol.2443 (1), p.12007
2023
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Journal of physics. Conference series, 2022-03, Vol.2240 (1), p.12050
2022
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Journal of physics. Conference series, 2020-04, Vol.1492 (1), p.12015
2020
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Journal of physics. Conference series, 2018-03, Vol.992 (1), p.12057
2018
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Journal of physics. Conference series, 2016-03, Vol.700 (1), p.12030
2016
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Applied surface science, 2014-09, Vol.312, p.107-111
2014
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Vacuum, 2015-01, Vol.111, p.5-8
2015
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Journal of physics. Conference series, 2014-01, Vol.514 (1), p.12037-5
2014
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Procedia engineering, 2014, Vol.87, p.260-263
2014
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2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.85-88
2016
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Journal of materials science and engineering. B, 2011-09, Vol.1 (4), p.523-529
2011
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2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.133-136
2016
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2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 2016, p.137-140
2016
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The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems, 2012, p.287-290
2012
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Scientific reports, 2021-05, Vol.11 (1), p.9649-9649, Article 9649
2021
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Trends in biotechnology (Regular ed.), 2024-01, Vol.42 (1), p.17-30
2024
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Trends in biochemical sciences (Amsterdam. Regular ed.), 2018-04, Vol.43 (4), p.232-236
2018
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International ophthalmology, 2023-10, Vol.43 (10), p.3559-3568
2023
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BMC bioinformatics, 2020-04, Vol.21 (1), p.132-132, Article 132
2020
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International journal of molecular sciences, 2021-03, Vol.22 (5), p.2630
2021
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Scientific reports, 2022-10, Vol.12 (1), p.17221-17221, Article 17221
2022
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Scientific reports, 2022-12, Vol.12 (1), p.22071-22071, Article 22071
2022
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Computational and structural biotechnology journal, 2024-12, Vol.23, p.1376-1386
2024
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