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Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders

Scientific reports, 2021-06, Vol.11 (1), p.13427-13427, Article 13427

2021

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Cascaded collimator for atomic beams traveling in planar silicon devices

Nature communications, 2019-04, Vol.10 (1), p.1831-1831, Article 1831

2019

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Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals

NPJ digital medicine, 2020-02, Vol.3 (1), p.19-19, Article 19

2020

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Eigenmode operation of piezoelectric resonant gyroscopes

Microsystems & nanoengineering, 2020-11, Vol.6 (1), p.108-108, Article 108

2020

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An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon

Sensors and actuators. A. Physical., 2008-05, Vol.144 (1), p.109-116

2008

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Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators

IEEE transactions on electron devices, 2013-08, Vol.60 (8), p.2656-2663

2013

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Temperature Compensation of Silicon Resonators via Degenerate Doping

IEEE transactions on electron devices, 2012-01, Vol.59 (1), p.87-93

2012

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4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

Communications engineering, 2024-06, Vol.3 (1), p.87-9, Article 87

2024

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Multi-coefficient eigenmode operation-breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Microsystems & nanoengineering, 2023, Vol.9 (1), p.18-18, Article 18

2023

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An Accelerometer-Based Wearable Patch for Robust Respiratory Rate and Wheeze Detection Using Deep Learning

Biosensors (Basel), 2024-02, Vol.14 (3), p.118

2024

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A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2023-10, Vol.70 (10), p.1172-1188

2023

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A Review of Eigen-Mode and Frequency Control in Piezoelectric MEMS Resonators

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2023-06, Vol.PP, p.1-1

2023

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Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators

IEEE journal of solid-state circuits, 2007-06, Vol.42 (6), p.1425-1434

2007

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Low motional impedance distributed Lamé mode resonators for high frequency timing applications

Microsystems & nanoengineering, 2020-06, Vol.6 (1), p.53-53, Article 53

2020

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Micromechanical IBARs: Tunable High- Q Resonators for Temperature-Compensated Reference Oscillators

Journal of microelectromechanical systems, 2010-06, Vol.19 (3), p.503-515

2010

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Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique

IEEE journal of solid-state circuits, 2012-06, Vol.47 (6), p.1381-1393

2012

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Micro-gravity capacitive silicon-on-insulator accelerometers

Journal of micromechanics and microengineering, 2005-11, Vol.15 (11), p.2113-2120

2005

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MEMS for integrated timing and spectral processing

2009 IEEE Custom Integrated Circuits Conference, 2009, p.65-72

Ayazi, F.

2009

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Robust characterization of microfabricated atomic beams on a six-month time scale

Physical review research, 2020-05, Vol.2 (2), Article 023239

2020

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A Dual-Mode Actuation and Sensing Scheme for In-Run Calibration of Bias and Scale Factor Errors in Axisymmetric Resonant Gyroscopes

IEEE sensors journal, 2018-03, Vol.18 (5), p.1993-2005

2018

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4H-Silicon Carbide as an Acoustic Material for MEMS

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2023-10, Vol.PP (10), p.1-1

2023

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A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Journal of microelectromechanical systems, 2020-10, Vol.29 (5), p.741-747

2020

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Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

Journal of microelectromechanical systems, 2023-10, Vol.32 (5), p.413-415

2023

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JMEMS Letters.1pt Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

Journal of microelectromechanical systems, 2023-08, p.1-3

2023

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Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Journal of microelectromechanical systems, 2020-12, Vol.29 (6), p.1473-1482

2020

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Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders

Cascaded collimator for atomic beams traveling in planar silicon devices

Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals

Eigenmode operation of piezoelectric resonant gyroscopes

An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon

Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators

Temperature Compensation of Silicon Resonators via Degenerate Doping

4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

Multi-coefficient eigenmode operation-breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

An Accelerometer-Based Wearable Patch for Robust Respiratory Rate and Wheeze Detection Using Deep Learning

A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators

A Review of Eigen-Mode and Frequency Control in Piezoelectric MEMS Resonators

Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators

Low motional impedance distributed Lamé mode resonators for high frequency timing applications

Micromechanical IBARs: Tunable High- Q Resonators for Temperature-Compensated Reference Oscillators

Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique

Micro-gravity capacitive silicon-on-insulator accelerometers

MEMS for integrated timing and spectral processing

Robust characterization of microfabricated atomic beams on a six-month time scale

A Dual-Mode Actuation and Sensing Scheme for In-Run Calibration of Bias and Scale Factor Errors in Axisymmetric Resonant Gyroscopes

4H-Silicon Carbide as an Acoustic Material for MEMS

A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

JMEMS Letters.1pt Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

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