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Extended defects in shallow implants

Applied physics. A, Materials science & processing, 2003-05, Vol.76 (7), p.1025-1033

2003

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Controlled fabrication of Si nanocrystal delta-layers in thin SiO2 layers by plasma immersion ion implantation for nonvolatile memories

Applied physics letters, 2013-12, Vol.103 (25)

2013

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Detection and characterization of silicon nanocrystals embedded in thin oxide layers

Journal of applied physics, 2004-01, Vol.95 (1), p.257-262

2004

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A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si

Applied physics letters, 2000-02, Vol.76 (7), p.852-854

2000

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Effect of Germanium content and strain on the formation of extended defects in ion implanted Silicon/Germanium

Thin solid films, 2010-02, Vol.518 (9), p.2338-2341

2010

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Hybrid systems with Ag nanocrystals and Si nanostructures synthesized by ultra-low-energy ion beam synthesis

Journal of applied physics, 2017-09, Vol.122 (10)

2017

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Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

Nanotechnology, 2007-05, Vol.18 (21), p.215204-215204 (7)

2007

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Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

Physica status solidi. A, Applications and materials science, 2007-02, Vol.204 (2), p.487-491

2007

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Structural and magnetic properties of N + -irradiated Co/Pt multilayers with perpendicular bimodal behaviour

Journal of magnetism and magnetic materials, 2007-08, Vol.315 (1), p.5-11

2007

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Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

Solid-state electronics, 2005-11, Vol.49 (11), p.1734-1744

2005

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An electron microscopy study of the growth of Ge nanoparticles in SiO2

Applied physics letters, 2000-06, Vol.76 (26), p.3962-3964

2000

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From continuous to quantized charging response of silicon nanocrystals obtained by ultra-low energy ion implantation

Solid-state electronics, 2005-07, Vol.49 (7), p.1198-1205

2005

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Characterization of silicon nanocrystals embedded in thin oxide layers by TOF-SIMS

Applied surface science, 2004-06, Vol.231, p.813-816

2004

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Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin SiO2 layers by low energy ion implantation

Journal of applied physics, 2004-05, Vol.95 (10), p.5696-5702

2004

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Magnetic easy-axis switching in Pt/Co/Pt sandwiches induced by nitrogen ion beam irradiation

Journal of applied physics, 2004-06, Vol.95 (12), p.8030-8034

2004

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The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

Nanotechnology, 2005-12, Vol.16 (12), p.2987-2992

2005

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Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

Microelectronic engineering, 2007-09, Vol.84 (9), p.1986-1989

2007

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Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon

Applied physics letters, 2001-02, Vol.78 (7), p.940-942

2001

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Ultra-low-energy ion-beam synthesis of nanometer-separated Si nanoparticles and Ag nanocrystals 2D layers

Materials research express, 2018-03, Vol.5 (3), p.35041

2018

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Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

Journal of applied physics, 2006-02, Vol.99 (4)

2006

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Electron transport through a metallic nanoparticle assembly embedded in SiO2 and SiNx by low energy ion implantation

Physica status solidi. C, 2015-12, Vol.12 (12), p.1328-1332

2015

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Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers

Applied physics letters, 2007-11, Vol.91 (21), p.211105-253124

2007

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Room-temperature quantum effect in silicon nanoparticles obtained by low-energy ion implantation and embedded in a nanometer scale capacitor

Applied physics letters, 2005-04, Vol.86 (16)

2005

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Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

Applied physics letters, 2004-09, Vol.85 (12), p.2373-2375

2004

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Ion beam synthesis of GaN precipitates in GaAs

Materials science & engineering. B, Solid-state materials for advanced technology, 2002-05, Vol.93 (1), p.10-14

2002

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Extended defects in shallow implants

Controlled fabrication of Si nanocrystal delta-layers in thin SiO2 layers by plasma immersion ion implantation for nonvolatile memories

Detection and characterization of silicon nanocrystals embedded in thin oxide layers

A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si

Effect of Germanium content and strain on the formation of extended defects in ion implanted Silicon/Germanium

Hybrid systems with Ag nanocrystals and Si nanostructures synthesized by ultra-low-energy ion beam synthesis

Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

Structural and magnetic properties of N + -irradiated Co/Pt multilayers with perpendicular bimodal behaviour

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

An electron microscopy study of the growth of Ge nanoparticles in SiO2

From continuous to quantized charging response of silicon nanocrystals obtained by ultra-low energy ion implantation

Characterization of silicon nanocrystals embedded in thin oxide layers by TOF-SIMS

Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin SiO2 layers by low energy ion implantation

Magnetic easy-axis switching in Pt/Co/Pt sandwiches induced by nitrogen ion beam irradiation

The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon

Ultra-low-energy ion-beam synthesis of nanometer-separated Si nanoparticles and Ag nanocrystals 2D layers

Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

Electron transport through a metallic nanoparticle assembly embedded in SiO2 and SiNx by low energy ion implantation

Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers

Room-temperature quantum effect in silicon nanoparticles obtained by low-energy ion implantation and embedded in a nanometer scale capacitor

Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

Ion beam synthesis of GaN precipitates in GaAs

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