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Variation in phase defect size on extreme ultraviolet mask before and after reflective multilayer coating

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2015-11, Vol.33 (6)

2015

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Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-11, Vol.31 (6), p.6

2013

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Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-11, Vol.31 (6), p.6

2013

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Identification of residual-type defect on extreme ultraviolet mask by projection electron microscope using Monte Carlo simulation

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2012-11, Vol.30 (6)

2012

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Analysis of image distortion on projection electron microscope image

Japanese Journal of Applied Physics, 2014-11, Vol.53 (11), p.116602-1-116602-9

2014

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Characterization of small phase defects using a micro-coherent extreme ultraviolet scatterometry microscope

Japanese Journal of Applied Physics, 2014-06, Vol.53 (6S), p.6-1-06JC03-6

2014

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Residual-type mask defect printability for extreme ultraviolet lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2012-11, Vol.30 (6)

2012

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Synthesis of Sulfilimines via Visible‐Light‐Mediated Triplet Energy Transfer to Sulfonyl Azides

Chemistry : a European journal, 2024-08, p.e202401842

2024

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Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability

Japanese Journal of Applied Physics, 2013-09, Vol.52 (9), p.096601-096601-8

2013

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Simulation technique for pattern inspection using a projection electron microscope

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2015-11, Vol.33 (6)

2015

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Prototyping in business model innovation : exploring the role of design thinking in business model development

Amano, Tsuyoshi

2019

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Design and Synthesis of a More Highly Selective Ammonium Ionophore Than Nonactin and Its Application as an Ion-Sensing Component for an Ion-Selective Electrode

Analytical chemistry (Washington), 2000-05, Vol.72 (10), p.2200-2205

2000

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Comparison of Two Molecular Design Strategies for the Development of an Ammonium Ionophore More Highly Selective than Nonactin

Analytical chemistry (Washington), 2002-09, Vol.74 (18), p.4845-4848

2002

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Hepatocellular carcinoma and focal nodular hyperplasia of the liver in a glycogen storage disease patient

World journal of hepatology, 2012-06, Vol.4 (6), p.191-195

2012

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Chemical pressure effect on the superconductor MgCNi3

Physica. C, Superconductivity, 2006-07, Vol.440 (1-2), p.6-9

2006

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Full color 3D point clouds from bird's-eye view using multi-view laser scanner and quadcopter

2018 International Workshop on Advanced Image Technology (IWAIT), 2018, p.1-3

2018

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Chemical pressure effect on the superconductor MgCNi 3

Physica. C, Superconductivity, 2006, Vol.440 (1), p.6-9

2006

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Design and synthesis of a more highly selective ammonium lonophore than nonactin and its application as an ion-sensing component for an ion-selective electrode

Analytical chemistry (Washington), 2000, Vol.72 (10), p.2200-2205

2000

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Synthesis of novel Hg2+ receptors based on N-benzyloxyamide derivatives and their application to anion-selective electrodes

Perkin 1 : an international journal of organic and bio-organic chemistry, 2001 (12), p.1366-1371

2001

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Observations and measurements of photomasks using an electron beam with energy of 50 keV or higher

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-11, Vol.21 (6), p.3131-3135

2003

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ChemInform Abstract: Synthesis of Novel Hg2+ Receptors Based on N-Benzyloxyamide Derivatives (I) and Their Application to Anion-Selective Electrodes

ChemInform, 2001-10, Vol.32 (43), p.no-no

2001

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ChemInform Abstract: Synthesis of Novel Hg 2+ Receptors Based on N‐Benzyloxyamide Derivatives (I) and Their Application to Anion‐Selective Electrodes

ChemInform, 2001-10, Vol.32 (43)

2001

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Prevalence of the Academic Research Consortium for High Bleeding Risk Criteria and Prognostic Value of a Simplified Definition

Circulation Journal, 2020/08/25, Vol.84(9), pp.1560-1567

2020

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Population-level laterality in foraging finless porpoises

Scientific reports, 2021-10, Vol.11 (1), p.21164-21164, Article 21164

2021

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Protective Effects of Extracorporeal Shockwave Therapy on the Degenerated Meniscus in a Rat Model

The American journal of sports medicine, 2024-02, Vol.52 (2), p.374-382

2024

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Variation in phase defect size on extreme ultraviolet mask before and after reflective multilayer coating

Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope

Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image

Identification of residual-type defect on extreme ultraviolet mask by projection electron microscope using Monte Carlo simulation

Analysis of image distortion on projection electron microscope image

Characterization of small phase defects using a micro-coherent extreme ultraviolet scatterometry microscope

Residual-type mask defect printability for extreme ultraviolet lithography

Synthesis of Sulfilimines via Visible‐Light‐Mediated Triplet Energy Transfer to Sulfonyl Azides

Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability

Simulation technique for pattern inspection using a projection electron microscope

Prototyping in business model innovation : exploring the role of design thinking in business model development

Design and Synthesis of a More Highly Selective Ammonium Ionophore Than Nonactin and Its Application as an Ion-Sensing Component for an Ion-Selective Electrode

Comparison of Two Molecular Design Strategies for the Development of an Ammonium Ionophore More Highly Selective than Nonactin

Hepatocellular carcinoma and focal nodular hyperplasia of the liver in a glycogen storage disease patient

Chemical pressure effect on the superconductor MgCNi3

Full color 3D point clouds from bird's-eye view using multi-view laser scanner and quadcopter

Chemical pressure effect on the superconductor MgCNi 3

Design and synthesis of a more highly selective ammonium lonophore than nonactin and its application as an ion-sensing component for an ion-selective electrode

Synthesis of novel Hg2+ receptors based on N-benzyloxyamide derivatives and their application to anion-selective electrodes

Observations and measurements of photomasks using an electron beam with energy of 50 keV or higher

ChemInform Abstract: Synthesis of Novel Hg2+ Receptors Based on N-Benzyloxyamide Derivatives (I) and Their Application to Anion-Selective Electrodes

ChemInform Abstract: Synthesis of Novel Hg 2+ Receptors Based on N‐Benzyloxyamide Derivatives (I) and Their Application to Anion‐Selective Electrodes

Prevalence of the Academic Research Consortium for High Bleeding Risk Criteria and Prognostic Value of a Simplified Definition

Population-level laterality in foraging finless porpoises

Protective Effects of Extracorporeal Shockwave Therapy on the Degenerated Meniscus in a Rat Model

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