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Thermal atomic layer etching of silicon nitride using an oxidation and “conversion etch” mechanism

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-03, Vol.38 (2)

2020

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Thermal Atomic Layer Etching of Silicon Using O2, HF, and Al(CH3)3 as the Reactants

Chemistry of materials, 2018-12, Vol.30 (23), p.8465-8475

2018

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Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Chemical communications (Cambridge, England), 2021-02, Vol.57 (17), p.216-2163

2021

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Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques

Advanced functional materials, 2013-02, Vol.23 (5), p.532-546

2013

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Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (VD) and azasilane

Chemical communications (Cambridge, England), 2020-08, Vol.56 (62), p.8778-8781

2020

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Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties

Chemistry of materials, 2012-08, Vol.24 (15), p.2854-2863

2012

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Capillary evaporation on micromembrane-enhanced microchannel wicks with atomic layer deposited silica

Applied physics letters, 2013-10, Vol.103 (15)

2013

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Protecting Polymers in Space with Atomic Layer Deposition Coatings

ACS applied materials & interfaces, 2010-09, Vol.2 (9), p.2515-2520

2010

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Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO2/Carbon Composite Films

Journal of physical chemistry. C, 2013-08, Vol.117 (34), p.17442-17450

2013

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Metal-Insulator-Metal Diodes: Role of the Insulator Layer on the Rectification Performance

Advanced materials (Weinheim), 2013-03, Vol.25 (9), p.1301-1308

2013

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Thermal Atomic Layer Etching of Silicon Using O 2 , HF, and Al(CH 3 ) 3 as the Reactants

Chemistry of materials, 2018-12, Vol.30 (23), p.8465-8475

2018

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Three-Dimensional Ni/TiO 2 Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Nano letters, 2012-02, Vol.12 (2), p.655-660

2012

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Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Applied surface science, 2023-11, Vol.638, p.157923, Article 157923

2023

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Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2021-03, Vol.39 (2)

2021

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Three-Dimensional Ni/TiO2 Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Nano letters, 2012-02, Vol.12 (2), p.655-660

2012

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Molecular Layer Deposition of Titanicone Films using TiCl 4 and Ethylene Glycol or Glycerol: Growth and Properties

Chemistry of materials, 2012-08, Vol.24 (15), p.2854-2863

2012

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In Situ Investigation of Thermally Induced Surface Graphenization of Polymer-Derived Ceramic (PDC) Coatings from Molecular Layer (MLD) Deposited Silicon-Based Preceramic Thin Films

Chemistry of materials, 2023-10, Vol.35 (19), p.8092-8100

2023

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Viscosity of tangerine and lemon juices as a function of temperature and concentration

International journal of food science & technology, 2007-07, Vol.42 (7), p.804-818

2007

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The ASTM Copper Strip Corrosion Test: Application to Propane with Carbonyl Sulfide and Hydrogen Sulfide

Energy & fuels, 2003-01, Vol.17 (1), p.120-126

2003

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Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition

Surface & coatings technology, 2011-02, Vol.205 (10), p.3334-3339

2011

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Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2014-01, Vol.32 (1)

2014

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Waterless TiO{sub 2} atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2014-01, Vol.32 (1)

2014

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Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO 2 /Carbon Composite Films

Journal of physical chemistry. C, 2013-08, Vol.117 (34), p.17442-17450

2013

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Three-Dimensional Ni/TiO sub(2) Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Nano letters, 2012-02, Vol.12 (2), p.655-660-655-660

2012

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Investigation of the defect density in ultra-thin Al 2O 3 films grown using atomic layer deposition

Surface & coatings technology, 2011, Vol.205 (10), p.3334-3339

2011

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Thermal atomic layer etching of silicon nitride using an oxidation and “conversion etch” mechanism

Thermal Atomic Layer Etching of Silicon Using O2, HF, and Al(CH3)3 as the Reactants

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques

Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (VD) and azasilane

Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties

Capillary evaporation on micromembrane-enhanced microchannel wicks with atomic layer deposited silica

Protecting Polymers in Space with Atomic Layer Deposition Coatings

Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO2/Carbon Composite Films

Metal-Insulator-Metal Diodes: Role of the Insulator Layer on the Rectification Performance

Thermal Atomic Layer Etching of Silicon Using O 2 , HF, and Al(CH 3 ) 3 as the Reactants

Three-Dimensional Ni/TiO 2 Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

Three-Dimensional Ni/TiO2 Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Molecular Layer Deposition of Titanicone Films using TiCl 4 and Ethylene Glycol or Glycerol: Growth and Properties

In Situ Investigation of Thermally Induced Surface Graphenization of Polymer-Derived Ceramic (PDC) Coatings from Molecular Layer (MLD) Deposited Silicon-Based Preceramic Thin Films

Viscosity of tangerine and lemon juices as a function of temperature and concentration

The ASTM Copper Strip Corrosion Test: Application to Propane with Carbonyl Sulfide and Hydrogen Sulfide

Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition

Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

Waterless TiO{sub 2} atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO 2 /Carbon Composite Films

Three-Dimensional Ni/TiO sub(2) Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications

Investigation of the defect density in ultra-thin Al 2O 3 films grown using atomic layer deposition

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