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CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry

Precision engineering, 2019-11, Vol.60, p.458-464

2019

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Characteristics and effectiveness of the face gear with transmission-error-controlled curve considering the path of contact (Effect of assembly and manufacturing errors on transmission error)

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2023, Vol.17(2), pp.JAMDSM0024-JAMDSM0024

2023

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Meshing mechanism considering various combinations of assembly and manufacturing errors on face gear using a transmission-error-controlled curve

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2023, Vol.17(6), pp.JAMDSM0068-JAMDSM0068

2023

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Influence of waveform components derived from the transmission error of a face gear pair on a fishing reel based on tactile sensibility

Precision engineering, 2018-01, Vol.51, p.232-243

2018

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Proposal of a face gear which generates virtual high mesh frequency by addition of grooves on the tooth flank, and the investigation via vibration simulator and actual samples

Precision engineering, 2017-01, Vol.47, p.321-332

2017

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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

International journal of precision engineering and manufacturing, 2021-06, Vol.22 (6), p.1021-1029

2021

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In-process tool wear detection by measuring the slip of AC induction motor in intermittent cutting process

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021, Vol.15(1), pp.JAMDSM0011-JAMDSM0011

2021

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Pitting failure of helical gears induced by trochoidal interference and multidirectional, interacting wear

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2020, Vol.14(4), pp.JAMDSM0060-JAMDSM0060

2020

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Validity of quantifying sensation of fishing reel using transmission error instead of sensory human evaluation for face gear design

Mechanical Engineering Journal, 2019, Vol.6(6), pp.19-00318-19-00318

2019

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Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer

International journal of precision engineering and manufacturing, 2018-12, Vol.19 (12), p.1773-1780

2018

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The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

ECS journal of solid state science and technology, 2017-01, Vol.6 (4), p.P105-P112

2017

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Influence of Coating in Square End Mill Using In-Process Tool Wear Detection Based on Electrical Contact Resistance

International journal of automation technology, 2019-01, Vol.13 (1), p.125-132

2019

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Machinability of SMART Forging Process Materials in Intermittent Cutting: 2nd Report : Machinability in Normal Cutting Region and Selection of Optimum Cutting Condition

E3S Web of Conferences, 2019, Vol.95, p.1001

2019

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Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

ECS journal of solid state science and technology, 2017, Vol.6 (12), p.P853-P861

2017

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Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

International journal of automation technology, 2018-03, Vol.12 (2), p.187-198

2018

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A high quality surface finish grinding process to produce total reflection mirror for x-ray fluorescence analysis

International Journal of Extreme Manufacturing, 2020-03, Vol.2 (1), p.15101

2020

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Derivation of Path of Contact and Tooth Flank Modification by Minimizing Transmission Error on Face Gear

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2012, Vol.6(1), pp.15-22

2012

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Analysis of Chemical and Mechanical Factors in CMP Processes for Improving Material Removal Rate

Journal of the Electrochemical Society, 2011, Vol.158 (3), p.H333

2011

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Evaluation of handle rotational feeling in fishing reels using a bone conduction speaker based on transmission error of gear pairs and predication by MT system

Mechanical Engineering Journal, 2015, Vol.2(6), pp.15-00339-15-00339

2015

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Measurement of molar concentration spectra for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip

Precision engineering, 2022-03, Vol.74, p.460-468

2022

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The Polishing Technology for Glass Substrates Using Tribo-Chemical Reaction and Electrical Slurry Control

Journal of the Electrochemical Society, 2012-01, Vol.159 (4), p.H421-H424

2012

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High-efficiency planarization method combining mechanical polishing and atmospheric-pressure plasma etching for hard-to-machine semiconductor substrates

Mechanical Engineering Journal, 2016, Vol.3(1), pp.15-00527-15-00527

2016

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Real-Time Evaluation of Tool Flank Wear by In-Process Contact Resistance Measurement in Face Milling

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2012, Vol.6(6), pp.958-970

2012

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The Effects of Strong Oxidizing Slurry and Processing Atmosphere on Double-Sided CMP of SiC Wafer

Advanced materials research, 2012-11, Vol.591-593, p.1131-1134

2012

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Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process

Microelectronic engineering, 2011-08, Vol.88 (8), p.1975-1977

2011

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CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry

Characteristics and effectiveness of the face gear with transmission-error-controlled curve considering the path of contact (Effect of assembly and manufacturing errors on transmission error)

Meshing mechanism considering various combinations of assembly and manufacturing errors on face gear using a transmission-error-controlled curve

Influence of waveform components derived from the transmission error of a face gear pair on a fishing reel based on tactile sensibility

Proposal of a face gear which generates virtual high mesh frequency by addition of grooves on the tooth flank, and the investigation via vibration simulator and actual samples

Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

In-process tool wear detection by measuring the slip of AC induction motor in intermittent cutting process

Pitting failure of helical gears induced by trochoidal interference and multidirectional, interacting wear

Validity of quantifying sensation of fishing reel using transmission error instead of sensory human evaluation for face gear design

Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Influence of Coating in Square End Mill Using In-Process Tool Wear Detection Based on Electrical Contact Resistance

Machinability of SMART Forging Process Materials in Intermittent Cutting: 2nd Report : Machinability in Normal Cutting Region and Selection of Optimum Cutting Condition

Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

A high quality surface finish grinding process to produce total reflection mirror for x-ray fluorescence analysis

Derivation of Path of Contact and Tooth Flank Modification by Minimizing Transmission Error on Face Gear

Analysis of Chemical and Mechanical Factors in CMP Processes for Improving Material Removal Rate

Evaluation of handle rotational feeling in fishing reels using a bone conduction speaker based on transmission error of gear pairs and predication by MT system

Measurement of molar concentration spectra for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip

The Polishing Technology for Glass Substrates Using Tribo-Chemical Reaction and Electrical Slurry Control

High-efficiency planarization method combining mechanical polishing and atmospheric-pressure plasma etching for hard-to-machine semiconductor substrates

Real-Time Evaluation of Tool Flank Wear by In-Process Contact Resistance Measurement in Face Milling

The Effects of Strong Oxidizing Slurry and Processing Atmosphere on Double-Sided CMP of SiC Wafer

Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process

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