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Ultra-fast aerial image simulation algorithm using wavelength scaling and fast Fourier transformation to speed up calculation by more than three orders of magnitude

Journal of Micro/Nanopatterning, Materials, and Metrology, 2023-04, Vol.22 (2)

2023

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Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses

Nanoscale advances, 2023-12, Vol.6 (1), p.197-28

2023

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Synthesis of pentameric chlorotin carboxylate clusters for high resolution EUV photoresists under small doses

Nanoscale advances, 2024-05, Vol.6 (11), p.2928-2944

2024

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X-ray diffraction studies of miscut crystal surfaces and overlayers: a dynamical diffraction approach

Materials chemistry and physics, 1995-07, Vol.41 (2), p.128-133

1995

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Dynamical calculation of crystal truncation rods for surfaces and interfaces using a Cartesian coordinate transformation technique

Acta crystallographica. Section A, Foundations of crystallography, 1999-07, Vol.55 (4), p.677-682

1999

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Determination of the interface structural morphology from grazing-incidence X-ray diffraction data using dynamical theory

Surface science, 1997-07, Vol.384 (1), p.254-259

1997

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Electron paramagnetic resonance of Cu2+ in KHCO3 crystals

Solid state communications, 1991-04, Vol.78 (2), p.123-127

1991

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Defect reduction with special routing for immersion lithography

Journal of micro/nanolithography, MEMS, and MOEMS, 2007-01, Vol.6 (1), p.10501

Liang, Fu-Jye

2007

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Thin-film optimization strategy in high numerical aperture optical lithography, part 1: principles

Journal of micro/nanolithography, MEMS, and MOEMS, 2005-10, Vol.4 (4), p.43003

Yu, Shinn-Sheng

2005

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Image characterization of bubbles in water for 193-nm immersion lithography—far-field approach

Journal of micro/nanolithography, MEMS, and MOEMS, 2004-01, Vol.3 (1), p.61

Gau, Tsai-Sheng

2004

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Critical dimension error analysis for 0.13 μm photolithography and beyond

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001-11, Vol.19 (6), p.2884-2889

2001

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Focus latitude enhancement of symmetrical phase mask design for deep submicron contact hole patterning

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001-11, Vol.19 (6), p.2195-2205

2001

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Solving the intensity problem of surface X-ray diffraction using dynamical theory

Physics letters. A, 1994-12, Vol.196 (3), p.223-228

1994

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Dynamical approach for X-ray diffraction from surfaces and interfaces: interpretation of crystal truncation rod using dynamical theory

Acta crystallographica. Section A, Foundations of crystallography, 1995-11, Vol.51 (6), p.920-931

1995

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Searching for truss alpha users in mobile telecommunications social networks

2013 IEEE Global Communications Conference (GLOBECOM), 2013, p.3072-3076

2013

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An implementation framework of mapreduce email social network analysis

Proceedings of the 6th ACM workshop on Wireless multimedia networking and computing, 2011, p.67-70

2011

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Ultra-fast aerial image simulation algorithm using wavelength scaling and fast Fourier transformation to speed up calculation by more than three orders of magnitude

Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses

Synthesis of pentameric chlorotin carboxylate clusters for high resolution EUV photoresists under small doses

X-ray diffraction studies of miscut crystal surfaces and overlayers: a dynamical diffraction approach

Dynamical calculation of crystal truncation rods for surfaces and interfaces using a Cartesian coordinate transformation technique

Determination of the interface structural morphology from grazing-incidence X-ray diffraction data using dynamical theory

Electron paramagnetic resonance of Cu2+ in KHCO3 crystals

Defect reduction with special routing for immersion lithography

Thin-film optimization strategy in high numerical aperture optical lithography, part 1: principles

Image characterization of bubbles in water for 193-nm immersion lithography—far-field approach

Critical dimension error analysis for 0.13 μm photolithography and beyond

Focus latitude enhancement of symmetrical phase mask design for deep submicron contact hole patterning

Solving the intensity problem of surface X-ray diffraction using dynamical theory

Dynamical approach for X-ray diffraction from surfaces and interfaces: interpretation of crystal truncation rod using dynamical theory

Searching for truss alpha users in mobile telecommunications social networks

An implementation framework of mapreduce email social network analysis

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