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Lithography of poly(methyl methacrylate) through the simultaneous excitation of inner- and outer-shell electrons

Applied physics. A, Materials science & processing, 2022-04, Vol.128 (4), Article 256

Amano, Sho

2022

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Water-window soft X-ray source using cryogenic Ar laser plasma

Japanese Journal of Applied Physics, 2018-12, Vol.57 (12), p.126201

Amano, Sho

2018

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High-average-power water window soft X-rays from an Ar laser plasma

Applied physics express, 2016-07, Vol.9 (7), p.76201

Amano, Sho

2016

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Laser plasma cryogenic target on translating substrate for generation of continuously repetitive EUV and soft X-ray pulses

Review of scientific instruments, 2014-06, Vol.85 (6)

Amano, Sho

2014

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Low-temperature crystallization of amorphous silicon and amorphous germanium by soft X-ray irradiation

Thin solid films, 2013-05, Vol.534, p.334-340

2013

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Laser plasma vacuum ultraviolet light source using solid rare-gas targets

Japanese Journal of Applied Physics, 2018-08, Vol.57 (8), p.86201

Amano, Sho

2018

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Laser-plasma debris from a rotating cryogenic–solid-Xe target

Review of scientific instruments, 2010-02, Vol.81 (2), p.023104-023104-6

2010

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Laser wavelength dependence of extreme ultraviolet light and particle emissions from laser-produced lithium plasmas

Applied physics letters, 2008-09, Vol.93 (9), p.091502-091502-3

2008

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Extreme ultraviolet source using a forced recombination process in lithium plasma generated by a pulsed laser

Applied physics letters, 2007-04, Vol.90 (15), p.151502-151502-3

2007

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Soft X-ray Conversion Efficiencies in Laser-Produced Xenon and Tin Plasmas in a 5--17 nm Wavelength Range

Japanese Journal of Applied Physics, 2011-09, Vol.50 (9), p.098001-098001-2

2011

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Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation

Review of scientific instruments, 2006-06, Vol.77 (6), p.063114-063114-4

2006

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Effect of Laser Plasma X-ray Irradiation on Nucleation in Amorphous Silicon Film

Japanese Journal of Applied Physics, 2009-05, Vol.48 (5R), p.50208

2009

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Laser-plasma extreme ultraviolet source at 6.7 nm using a rotating cryogenic Xe target

Applied physics. B, Lasers and optics, 2012-09, Vol.108 (4), p.743-747

2012

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X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2023-12, Vol.41 (6)

2023

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Soft x-ray spectra from laser heated lithium targets

Applied physics letters, 2006-07, Vol.89 (4), p.041501-041501-3

2006

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Effect of Laser-Plasma X-Ray Irradiation on Crystallization of Amorphous Silicon Film by Excimer Laser Annealing

Japanese Journal of Applied Physics, 2007-11, Vol.46 (11L), p.L1061

2007

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Xe capillary target for laser-plasma extreme ultraviolet source

Review of scientific instruments, 2007-10, Vol.78 (10), p.105105-105105-5

2007

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Characterization of Fast Ion and Neutral Debris from Laser-Produced Lithium Plasmas

Japanese Journal of Applied Physics, 2007-03, Vol.46 (3L), p.L253

2007

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Soft x-ray emissions from laser plasma of cryogenic mixture targets

Applied physics letters, 1999-10, Vol.75 (14), p.2026-2028

1999

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Design of Laser-Excited Needle-RF-Gun

Japanese Journal of Applied Physics, 2003-01, Vol.42 (Part 1, No. 1), p.311-317

2003

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Characteristics of a cylindrical collector mirror for laser-produced xenon plasma soft X-rays and improvement of mirror lifetime by buffer gas

Review of scientific instruments, 2012-12, Vol.83 (12), p.123110-123110

2012

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Confocal Multipath Laser Cavity to Enhance Compton Backscattering

Japanese Journal of Applied Physics, 2001, Vol.40 (2R), p.654

2001

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Enhanced Quantum Efficiency of Photocathode under High Electric Field

Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 12), p.7402-7406

2002

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Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω , 2 ω , and 3 ω Nd:YAG laser-produced plasmas

Applied physics letters, 2005-06, Vol.86 (26), p.261502-261502-3

2005

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High average and high peak brightness slab laser

IEEE journal of quantum electronics, 2001-02, Vol.37 (2), p.296-303

2001

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Lithography of poly(methyl methacrylate) through the simultaneous excitation of inner- and outer-shell electrons

Water-window soft X-ray source using cryogenic Ar laser plasma

High-average-power water window soft X-rays from an Ar laser plasma

Laser plasma cryogenic target on translating substrate for generation of continuously repetitive EUV and soft X-ray pulses

Low-temperature crystallization of amorphous silicon and amorphous germanium by soft X-ray irradiation

Laser plasma vacuum ultraviolet light source using solid rare-gas targets

Laser-plasma debris from a rotating cryogenic–solid-Xe target

Laser wavelength dependence of extreme ultraviolet light and particle emissions from laser-produced lithium plasmas

Extreme ultraviolet source using a forced recombination process in lithium plasma generated by a pulsed laser

Soft X-ray Conversion Efficiencies in Laser-Produced Xenon and Tin Plasmas in a 5--17 nm Wavelength Range

Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation

Effect of Laser Plasma X-ray Irradiation on Nucleation in Amorphous Silicon Film

Laser-plasma extreme ultraviolet source at 6.7 nm using a rotating cryogenic Xe target

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Soft x-ray spectra from laser heated lithium targets

Effect of Laser-Plasma X-Ray Irradiation on Crystallization of Amorphous Silicon Film by Excimer Laser Annealing

Xe capillary target for laser-plasma extreme ultraviolet source

Characterization of Fast Ion and Neutral Debris from Laser-Produced Lithium Plasmas

Soft x-ray emissions from laser plasma of cryogenic mixture targets

Design of Laser-Excited Needle-RF-Gun

Characteristics of a cylindrical collector mirror for laser-produced xenon plasma soft X-rays and improvement of mirror lifetime by buffer gas

Confocal Multipath Laser Cavity to Enhance Compton Backscattering

Enhanced Quantum Efficiency of Photocathode under High Electric Field

Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω , 2 ω , and 3 ω Nd:YAG laser-produced plasmas

High average and high peak brightness slab laser

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