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Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro and Nanometer Range

1, 2005

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Computing the Dirichlet--Neumann Operator on a Cylinder

SIAM journal on numerical analysis, 2019-01, Vol.57 (3), p.1183-1204

2019

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Towards a Guideline for SPM Calibration

Nanoscale Calibration Standards and Methods, 2005, p.171-192

2005

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Standards for the Calibration of Instruments for Dimensional Nanometrology

Nanoscale Calibration Standards and Methods, 2005, p.243-258

2005

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True Three‐Dimensional Calibration of Closed Loop Scanning Probe Microscopes

Nanoscale Calibration Standards and Methods, 2005, p.193-204

2005

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Comparison of Different Methods of SFM Tip Shape Determination for Various Characterisation Structures and Types of Tip

Nanoscale Calibration Standards and Methods, 2005, p.311-320

2005

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Reconstruction and Geometric Assessment of AFM Tips

Nanoscale Calibration Standards and Methods, 2005, p.295-310

2005

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Lateral and Vertical Diameter Measurements on Polymer Particles with a Metrology AFM

Nanoscale Calibration Standards and Methods, 2005, p.359-374

2005

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Metrological Large Range Scanning Force Microscope Applicable for Traceable Calibration of Surface Textures

Nanoscale Calibration Standards and Methods, 2005, p.73-92

2005

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Analysis and Comparison of CD‐SEM Edge Operators: A Contribution to Feature Width Metrology

Nanoscale Calibration Standards and Methods, 2005, p.385-403

2005

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Testing the Lateral Resolution in the Nanometre Range with a New Type of Certified Reference Material

Nanoscale Calibration Standards and Methods, 2005, p.282-294

2005

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Combined Confocal and Scanning Probe Sensor for Nano‐Coordinate Metrology

Nanoscale Calibration Standards and Methods, 2005, p.131-143

2005

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Nanodeformation Analysis Near Small Cracks by Means of NanoDAC Technique

Nanoscale Calibration Standards and Methods, 2005, p.481-499

2005

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Coordinate Measurements in Microsystems by Using AFM‐Probing: Problems and Solutions

Nanoscale Calibration Standards and Methods, 2005, p.60-72

2005

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Low Noise Piezoresistive Micro Force Sensor

Nanoscale Calibration Standards and Methods, 2005, p.157-170

2005

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Combined Shear Force–Tunneling Microscope with Interferometric Tip Oscillation Detection for Local Surface Investigation and Oxidation

Nanoscale Calibration Standards and Methods, 2005, p.144-156

2005

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Pitch and CD Measurements at Anisotropically Etched Si Structures in an SEM

Nanoscale Calibration Standards and Methods, 2005, p.375-384

2005

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Height and Pitch at Nanoscale – How Traceable is Nanometrology?

Nanoscale Calibration Standards and Methods, 2005, p.205-219

2005

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Advances in Traceable Nanometrology with the Nanopositioning and Nanomeasuring Machine

Nanoscale Calibration Standards and Methods, 2005, p.45-59

2005

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“Atomic Flat” Silicon Surface for the Calibration of Stylus Instruments

Nanoscale Calibration Standards and Methods, 2005, p.259-268

2005

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Scanning Probe Microscope Setup with Interferometric Drift Compensation

Nanoscale Calibration Standards and Methods, 2005, p.109-118

2005

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How Statistical Noise Limits the Accuracy of Optical Interferometry for Nanometrology

Nanoscale Calibration Standards and Methods, 2005, p.331-344

2005

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Atomic Force Microscope Tip Influence on the Fractal and Multi‐Fractal Analyses of the Properties of Randomly Rough Surfaces

Nanoscale Calibration Standards and Methods, 2005, p.452-462

2005

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PTB's Precision Interferometer for High Accuracy Characterization of Thermal Expansion Properties of Low Expansion Materials

Nanoscale Calibration Standards and Methods, 2005, p.500-514

2005

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Metrological Scanning Probe Microscopes ‐ Instruments for Dimensional Nanometrology

Nanoscale Calibration Standards and Methods, 2005, p.1-21

2005

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Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro and Nanometer Range

Computing the Dirichlet--Neumann Operator on a Cylinder

Towards a Guideline for SPM Calibration

Standards for the Calibration of Instruments for Dimensional Nanometrology

True Three‐Dimensional Calibration of Closed Loop Scanning Probe Microscopes

Comparison of Different Methods of SFM Tip Shape Determination for Various Characterisation Structures and Types of Tip

Reconstruction and Geometric Assessment of AFM Tips

Lateral and Vertical Diameter Measurements on Polymer Particles with a Metrology AFM

Metrological Large Range Scanning Force Microscope Applicable for Traceable Calibration of Surface Textures

Analysis and Comparison of CD‐SEM Edge Operators: A Contribution to Feature Width Metrology

Testing the Lateral Resolution in the Nanometre Range with a New Type of Certified Reference Material

Combined Confocal and Scanning Probe Sensor for Nano‐Coordinate Metrology

Nanodeformation Analysis Near Small Cracks by Means of NanoDAC Technique

Coordinate Measurements in Microsystems by Using AFM‐Probing: Problems and Solutions

Low Noise Piezoresistive Micro Force Sensor

Combined Shear Force–Tunneling Microscope with Interferometric Tip Oscillation Detection for Local Surface Investigation and Oxidation

Pitch and CD Measurements at Anisotropically Etched Si Structures in an SEM

Height and Pitch at Nanoscale – How Traceable is Nanometrology?

Advances in Traceable Nanometrology with the Nanopositioning and Nanomeasuring Machine

“Atomic Flat” Silicon Surface for the Calibration of Stylus Instruments

Scanning Probe Microscope Setup with Interferometric Drift Compensation

How Statistical Noise Limits the Accuracy of Optical Interferometry for Nanometrology

Atomic Force Microscope Tip Influence on the Fractal and Multi‐Fractal Analyses of the Properties of Randomly Rough Surfaces

PTB's Precision Interferometer for High Accuracy Characterization of Thermal Expansion Properties of Low Expansion Materials

Metrological Scanning Probe Microscopes ‐ Instruments for Dimensional Nanometrology

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