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Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

Physica status solidi. A, Applications and materials science, 2012-04, Vol.209 (4), p.724-726

2012

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Physical mechanisms of boron diffusion gettering of iron in silicon

Physica status solidi. PSS-RRL. Rapid research letters, 2010-06, Vol.4 (5-6), p.136-138

2010

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Gettering of iron in CZ-silicon by polysilicon layer

Physica status solidi. C, 2011-03, Vol.8 (3), p.751-754

2011

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As-grown iron precipitates and gettering in multicrystalline silicon

Materials science & engineering. B, Solid-state materials for advanced technology, 2009-03, Vol.159, p.248-252

2009

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Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Materials science & engineering. B, Solid-state materials for advanced technology, 2009-03, Vol.159, p.224-227

2009

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Effect of internal gettering of iron on electrical characteristics of devices

Materials science & engineering. B, Solid-state materials for advanced technology, 2009-03, Vol.159, p.269-273

2009

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Effect of transition metals on oxygen precipitation in silicon

Journal of physics. Conference series, 2008-03, Vol.100 (7), p.072045

2008

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Diffusion gettering of metal impurities in crystalline silicon

2012 38th IEEE Photovoltaic Specialists Conference, 2012, p.001495-001497

2012

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Effect of Thermal History on Iron Precipitation in Crystalline Silicon

Energy procedia, 2011, Vol.8, p.355-359

2011

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Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

Physical mechanisms of boron diffusion gettering of iron in silicon

Gettering of iron in CZ-silicon by polysilicon layer

As-grown iron precipitates and gettering in multicrystalline silicon

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Effect of internal gettering of iron on electrical characteristics of devices

Effect of transition metals on oxygen precipitation in silicon

Diffusion gettering of metal impurities in crystalline silicon

Effect of Thermal History on Iron Precipitation in Crystalline Silicon

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