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Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

Journal of process control, 2008-12, Vol.18 (10), p.961-974

2008

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An Approach for Factory-Wide Control Utilizing Virtual Metrology

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.364-375

2007

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The Emergence of Industrial Control Networks for Manufacturing Control, Diagnostics, and Safety Data

Proceedings of the IEEE, 2007-01, Vol.95 (1), p.29-47

2007

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SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.408-420

2007

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Favorable effect of time delays on tracking performance of type-I control systems

IET control theory & applications, 2008-03, Vol.2 (3), p.210-218

2008

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Using deadbands to reduce communication in networked control systems

Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301), 2002, Vol.4, p.3015-3020 vol.4

2002

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Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

IEEE transactions on semiconductor manufacturing, 1995-08, Vol.8 (3), p.286-297

1995

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Performance evaluation of wireless networks for factory automation applications

2009 IEEE International Conference on Automation Science and Engineering, 2009, p.340-346

2009

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An application of entity-relationship data modeling techniques to the automated manufacturing process

Proceedings. Second International Conference on Data and Knowledge Systems for Manufacturing and Engineering, 1989, p.206-215

1989

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A generic cell controller for the automated VLSI manufacturing facility

IEEE transactions on semiconductor manufacturing, 1992-05, Vol.5 (2), p.77-87

1992

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A prototype SECS message service for communication in the semiconductor manufacturing environment

IEEE transactions on semiconductor manufacturing, 1989-11, Vol.2 (4), p.165-177

1989

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Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

An Approach for Factory-Wide Control Utilizing Virtual Metrology

The Emergence of Industrial Control Networks for Manufacturing Control, Diagnostics, and Safety Data

SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing

Favorable effect of time delays on tracking performance of type-I control systems

Using deadbands to reduce communication in networked control systems

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

Performance evaluation of wireless networks for factory automation applications

An application of entity-relationship data modeling techniques to the automated manufacturing process

A generic cell controller for the automated VLSI manufacturing facility

A prototype SECS message service for communication in the semiconductor manufacturing environment

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