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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1987-01, Vol.5 (1), p.197-202
1987
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- J. Vac. Sci. Technol., B;
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
- Journal Of Vacuum Science & Technology B: Microelectronics Processing And Phenomena
- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Journal Of Vacuum Science & Technology. B, Microelectronics Processing And Phenomena