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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-03, Vol.38 (2)
2020
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Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174011
2011
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-09, Vol.35 (5)
2017
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Plasma processes and polymers, 2019-09, Vol.16 (9), p.n/a
2019
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ACS sensors, 2018-04, Vol.3 (4), p.799-805
2018
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IEEE transactions on semiconductor manufacturing, 2024-08, p.1-1
2024
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Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SE0801
2019
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Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers
2012
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-05, Vol.38 (3)
2020
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-05, Vol.36 (3)
2018
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Plasma processes and polymers, 2019-09, Vol.16 (9), p.n/a
2019
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Optica, 2022-03, Vol.9 (3), p.284
2022
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-05, Vol.36 (3)
2018
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)
2015
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)
2015
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)
2015
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Japanese Journal of Applied Physics, 2019-05, Vol.58 (SE)
2019
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-07, Vol.31 (4)
2013
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2019 IEEE 69th Electronic Components and Technology Conference (ECTC), 2019, p.528-534
2019
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Plasma Processing of Nanomaterials, 2012, p.1-34
1, 2012
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2017 IEEE 67th Electronic Components and Technology Conference (ECTC), 2017, p.667-674
2017
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2019 Optical Fiber Communications Conference and Exhibition (OFC), 2019, p.1-3
2019
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- Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
- Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
- Japanese Journal Of Applied Physics
- Journal Of Vacuum Science & Technology A: Vacuum, Surfaces, And Films
- Plasma Processes And Polymers
- Acs Sensors
- Annual Review Of Chemical And Biomolecular Engineering
- Ieee Transactions On Semiconductor Manufacturing
- Journal Of Physics D: Applied Physics
- Journal Of Physics. D, Applied Physics
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