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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-11, Vol.24 (6), p.2737-2740

2006

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Highly oriented ZnO thin films deposited on Ru/Si substrates

Thin solid films, 1999-09, Vol.353 (1), p.12-15

1999

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High-density plasma etching of indium–zinc oxide films in Ar/Cl2 and Ar/CH4/H2 chemistries

Applied surface science, 2006-12, Vol.253 (5), p.2752-2757

2006

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