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Microelectronic engineering, 2018-11, Vol.199, p.101-105
2018
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Journal of applied physics, 2017-01, Vol.121 (4), p.044909-044909
2017
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Micro and Nano Engineering, 2023-12, Vol.21, p.100230, Article 100230
2023
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Journal of micromechanics and microengineering, 2011-11, Vol.21 (11), p.115013
2011
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Microfluidics and nanofluidics, 2011-05, Vol.10 (5), p.1045-1054
2011
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Nanotechnology, 2005-05, Vol.16 (5), p.S171-S175
2005
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Nano Convergence, 2017, 4(4), , pp.1-10
2017
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Microelectronic engineering, 2011-11, Vol.88 (11), p.3287-3292
2011
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Nanotechnology, 2018-09, Vol.29 (36), p.365302-365302
2018
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Nanotechnology, 2005-05, Vol.16 (5), p.S261-S265
2005
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Microelectronic engineering, 2018-08, Vol.195, p.50-56
2018
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Microsystem technologies, 2008-10, Vol.14 (9-11), p.1593-1597
2008
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Microelectronic engineering, 2016-06, Vol.158, p.130-134
2016
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Applied physics letters, 2005-01, Vol.86 (5), p.051101-051101-3
2005
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Microelectronic engineering, 2018-06, Vol.193, p.71-78
2018
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Applied physics letters, 2001-12, Vol.79 (25), p.4124-4126
2001
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Microelectronic engineering, 2003-06, Vol.67, p.252-258
2003
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Vacuum, 2002-09, Vol.67 (1), p.101-113
2002
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Applied physics. A, Materials science & processing, 2009-11, Vol.97 (2), p.395-402
2009
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Journal of micromechanics and microengineering, 2011-03, Vol.21 (3), p.035016
2011
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Journal of micromechanics and microengineering, 2012-11, Vol.22 (11), p.115027-11
2012
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Journal of micromechanics and microengineering, 2010-08, Vol.20 (8), p.085011-085011
2010
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Journal of micromechanics and microengineering, 2009-12, Vol.19 (12), p.125025-125025 (11)
2009
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Microelectronic engineering, 2004-06, Vol.73, p.196-201
2004
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-03, Vol.26 (2), p.598-605
2008
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Zeitschrift / Serie
- Microelectronic Engineering
- Journal Of Micromechanics And Microengineering
- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Nanotechnology
- Applied Physics Letters
- Microsystem Technologies : Sensors, Actuators, Systems Integration
- Applied Physics. A, Materials Science & Processing
- Journal Of Applied Physics
- Journal Of Crystal Growth
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures