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Sputtered nanocrystalline NiO thin films for very low ethanol detection

Vacuum, 2014-09, Vol.107, p.129-131

2014

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Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching

Journal of micromechanics and microengineering, 2015-07, Vol.25 (7), p.74006-7

2015

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Treatment of TiO2 surface for deposition of gold nanoparticles from colloidal suspension

Journal of micromechanics and microengineering, 2015-07, Vol.25 (7)

2015

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Structural and morphological evaluation of layered WS2 thin films

Vacuum, 2020-09, Vol.179, p.109570, Article 109570

2020

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Effect of deposition temperature on the properties of amorphous silicon carbide thin films

Thin solid films, 2006-10, Vol.515 (2), p.651-653

2006

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Dry etching characteristics of TiO2 thin films using inductively coupled plasma for gas sensing

Vacuum, 2014-09, Vol.107, p.20-22

2014

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Effects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin films

Thin solid films, 2009-12, Vol.518 (4), p.1103-1108

2009

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Preparation and characterization of NiO thin films for gas sensor applications

Vacuum, 2000-08, Vol.58 (2), p.300-307

2000

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Deposition and properties of nickel oxide films produced by DC reactive magnetron sputtering

Vacuum, 1998-10, Vol.51 (2), p.157-160

1998

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Preparation of thin GaAs suspended membranes for gas micro-sensors using plasma etching

Vacuum, 2007-10, Vol.82 (2), p.236-239

2007

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Further studies of N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

Thin solid films, 2004-07, Vol.459 (1), p.149-151

2004

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Study of Annealed NiO Thin Films Sputtered on Unheated Substrate

Japanese Journal of Applied Physics, 2003-10, Vol.42 (Part 2, No. 10A), p.L1178-L1181

2003

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Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD

Vacuum, 2002-09, Vol.67 (3), p.567-570

2002

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Investigation of radiation damage in N doped a-SiC : H films annealed by pulsed electron beam

Vacuum, 2000-08, Vol.58 (2), p.428-433

2000

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Reactively sputtered NbN Schottky contacts on GaAs and their thermal stability

Vacuum, 1998-07, Vol.50 (3-4), p.403-406

1998

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Sputtered NiO thin films for organic vapours testing

The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems, 2012, p.291-294

2012

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Characterization of nitrogen-doped amorphous silicon carbide thin films

Vacuum, 1998-10, Vol.51 (2), p.165-167

1998

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Relationship between the electronic properties of the interface and the interphase interactions in NbN-GaAs heterostructures

Technical physics, 1998-01, Vol.43 (1), p.56-59

1998

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TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques

AIP Conference Proceedings, 2021, Vol.2411 (1)

2021

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Platinum hotplate on thermoisolated polyimide membrane as perspective device used in MEMS

AIP Conference Proceedings, 2021, Vol.2411 (1)

2021

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Increased sensitivity of a gas sensor by controlled extension of TiO2 active area

AIP Conference Proceedings, 2018, Vol.1996 (1)

2018

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High mobility annealing of Transparent Conductive Oxides

IOP conference series. Materials Science and Engineering, 2012-01, Vol.34 (1), p.12004-15

2012

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Top gated graphene transistors with different gate insulators

Physica status solidi. C, 2010-02, Vol.7 (2), p.390-393

2010

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Sputtered nanocrystalline NiO thin films for very low ethanol detection

Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching

Treatment of TiO2 surface for deposition of gold nanoparticles from colloidal suspension

Structural and morphological evaluation of layered WS2 thin films

Effect of deposition temperature on the properties of amorphous silicon carbide thin films

Dry etching characteristics of TiO2 thin films using inductively coupled plasma for gas sensing

Effects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin films

Preparation and characterization of NiO thin films for gas sensor applications

Deposition and properties of nickel oxide films produced by DC reactive magnetron sputtering

Preparation of thin GaAs suspended membranes for gas micro-sensors using plasma etching

Further studies of N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

Study of Annealed NiO Thin Films Sputtered on Unheated Substrate

Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD

Investigation of radiation damage in N doped a-SiC : H films annealed by pulsed electron beam

Reactively sputtered NbN Schottky contacts on GaAs and their thermal stability

Sputtered NiO thin films for organic vapours testing

Characterization of nitrogen-doped amorphous silicon carbide thin films

Relationship between the electronic properties of the interface and the interphase interactions in NbN-GaAs heterostructures

TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques

Platinum hotplate on thermoisolated polyimide membrane as perspective device used in MEMS

Increased sensitivity of a gas sensor by controlled extension of TiO2 active area

High mobility annealing of Transparent Conductive Oxides

Top gated graphene transistors with different gate insulators

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