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Ion-acoustic waves in weakly ionized plasmas with charge-exchange collisions

Scientific reports, 2023-08, Vol.13 (1), p.14121-14121, Article 14121

2023

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Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge

Journal of physics. D, Applied physics, 2022-01, Vol.55 (1), p.15202

2022

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A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

Plasma sources science & technology, 2017-11, Vol.26 (12), p.125003

2017

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Carbon nanotube growth mechanism switches from tip- to base-growth with decreasing catalyst particle size

Carbon (New York), 2008-08, Vol.46 (10), p.1331-1338

2008

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On the polytropic coefficient of negative ions for modeling the sheath and presheath of electronegative plasmas

Journal of applied physics, 2023-08, Vol.134 (7)

2023

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Taming microwave plasma to beat thermodynamics in CO2 dissociation

Faraday discussions, 2015-01, Vol.183, p.233-248

2015

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On the HiPIMS benefits of multi-pulse operating mode

Journal of physics. D, Applied physics, 2015-01, Vol.48 (1), p.15202-10

2015

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An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2016-10, Vol.25 (6)

2016

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Effect of space charge on vacuum pre-breakdown voltage and electron emission current

Journal of applied physics, 2021-04, Vol.129 (15)

2021

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A study of the oxygen dynamics in a reactive Ar/O2 high power impulse magnetron sputtering discharge using an ionization region model

Journal of applied physics, 2017-05, Vol.121 (17)

2017

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On the use of ultra-high resolution PIC methods to unveil microscale effects of plasma kinetic instabilities: electron trapping and release by electrostatic tidal effect

Plasma sources science & technology, 2022-04, Vol.31 (4), p.4

2022

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Plasma power balance: methodology and investigations of microwave capillary discharges

Plasma sources science & technology, 2022-05, Vol.31 (5), p.55003

2022

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Particle injection methods in 3D-PIC MCC simulations applied to plasma grid biasing

Physics of plasmas, 2024-03, Vol.31 (3)

2024

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Target ion and neutral spread in high power impulse magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-01, Vol.41 (1)

2023

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Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

Surface & coatings technology, 2018-11, Vol.354, p.351-359

2018

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Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling

Surface & coatings technology, 2014-09, Vol.255, p.52-61

2014

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Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics

Plasma sources science & technology, 2015-08, Vol.24 (4), p.45011-21

2015

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Extracted current saturation in negative ion sources

Journal of applied geophysics, 2012-06, Vol.111 (11), p.113303-113303-10

2012

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Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Plasma sources science & technology, 2012-04, Vol.21 (2), p.25005-1-9

2012

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Microwave air plasmas in capillaries at low pressure II. Experimental investigation

Journal of physics. D, Applied physics, 2016-11, Vol.49 (43), p.435202

2016

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Self-consistent Monte Carlo model for ECRIS plasma simulation

Journal of physics. Conference series, 2022, Vol.2244 (1), p.12027

2022

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Modeling of high power impulse magnetron sputtering discharges with graphite target

Plasma sources science & technology, 2021-11, Vol.30 (11), p.115017

2021

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The role of Ohmic heating in dc magnetron sputtering

Plasma sources science & technology, 2016-11, Vol.25 (6), p.65024

2016

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On the meniscus formation and the negative hydrogen ion extraction from ITER neutral beam injection relevant ion source

Plasma physics and controlled fusion, 2014-10, Vol.56 (10), p.105001-11

2014

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Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

Plasma sources science & technology, 2011-08, Vol.20 (4), p.45020

2011

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1 – 25 von 1.130

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Ion-acoustic waves in weakly ionized plasmas with charge-exchange collisions

Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge

A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

Carbon nanotube growth mechanism switches from tip- to base-growth with decreasing catalyst particle size

On the polytropic coefficient of negative ions for modeling the sheath and presheath of electronegative plasmas

Taming microwave plasma to beat thermodynamics in CO2 dissociation

On the HiPIMS benefits of multi-pulse operating mode

An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

Effect of space charge on vacuum pre-breakdown voltage and electron emission current

A study of the oxygen dynamics in a reactive Ar/O2 high power impulse magnetron sputtering discharge using an ionization region model

On the use of ultra-high resolution PIC methods to unveil microscale effects of plasma kinetic instabilities: electron trapping and release by electrostatic tidal effect

Plasma power balance: methodology and investigations of microwave capillary discharges

Particle injection methods in 3D-PIC MCC simulations applied to plasma grid biasing

Target ion and neutral spread in high power impulse magnetron sputtering

Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling

Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics

Extracted current saturation in negative ion sources

Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Microwave air plasmas in capillaries at low pressure II. Experimental investigation

Self-consistent Monte Carlo model for ECRIS plasma simulation

Modeling of high power impulse magnetron sputtering discharges with graphite target

The role of Ohmic heating in dc magnetron sputtering

On the meniscus formation and the negative hydrogen ion extraction from ITER neutral beam injection relevant ion source

Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

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