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Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

Journal of applied physics, 2022-04, Vol.131 (13)

2022

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Time-resolved laser-induced fluorescence spectroscopy using CW diode laser for diagnostics of argon-ion velocity distribution near AC-biased electrode

Review of scientific instruments, 2024-05, Vol.95 (5)

2024

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Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Applied physics letters, 2022-01, Vol.120 (3)

2022

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Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

Journal of physics. D, Applied physics, 2019-11, Vol.52 (45)

2019

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Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements

Journal of physics. D, Applied physics, 2010-03, Vol.43 (9), p.095201-095201

2010

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Characterization of the distribution of defects introduced by plasma exposure in Si substrate

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-01, Vol.37 (1)

2019

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Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser

Applied physics letters, 2012-07, Vol.101 (5), p.51105

2012

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Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework

Plasma processes and polymers, 2019-09, Vol.16 (9), p.n/a

2019

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Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

Plasma sources science & technology, 2020-02, Vol.29 (2), p.25017

2020

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Characterization of surface modification mechanisms for boron nitride films under plasma exposure

Surface & coatings technology, 2019-11, Vol.377, p.124854, Article 124854

2019

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Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

Journal of physics. D, Applied physics, 2018-10, Vol.52 (2)

2018

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Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

Journal of physics. D, Applied physics, 2017-03, Vol.50 (16), p.165201

2017

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Generation of dusty plasmas in supercritical carbon dioxide using surface dielectric barrier discharges

Journal of physics. D, Applied physics, 2015-10, Vol.48 (45), p.454002-454008

2015

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Review of electric discharge microplasmas generated in highly fluctuating fluids: Characteristics and application to nanomaterials synthesis

Physics of plasmas, 2015-05, Vol.22 (5)

2015

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Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma

Journal of physics. D, Applied physics, 2014-07, Vol.47 (26), p.1-5

2014

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Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture

Journal of physics. D, Applied physics, 2011-03, Vol.44 (11), p.115203

2011

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Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma

Plasma sources science & technology, 2014-12, Vol.23 (6), p.64007-9

2014

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Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid

Applied physics letters, 2012-11, Vol.101 (22)

2012

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Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor

Diamond and related materials, 2015-10, Vol.59, p.40-46

2015

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Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

IEEE journal of the Electron Devices Society, 2022, Vol.10, p.769-777

2022

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Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state

Journal of applied physics, 2013-10, Vol.114 (14)

2013

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Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

Japanese Journal of Applied Physics, 2015-10, Vol.54 (10), p.106101

2015

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Breakdown Characteristics of Electrical Discharges in High-Density Helium Near the Critical Point

Applied physics express, 2013-08, Vol.6 (8), p.86201

2013

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Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

Japanese Journal of Applied Physics, 2010-10, Vol.49 (10), p.106001-106001-6

2010

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Development of Near-Infrared Laser Heterodyne Interferometry for Diagnostics of Electron and Gas Number Densities in Microplasmas

Applied physics express, 2013-12, Vol.6 (12), p.126101

2013

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Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

Time-resolved laser-induced fluorescence spectroscopy using CW diode laser for diagnostics of argon-ion velocity distribution near AC-biased electrode

Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements

Characterization of the distribution of defects introduced by plasma exposure in Si substrate

Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser

Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework

Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

Characterization of surface modification mechanisms for boron nitride films under plasma exposure

Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

Generation of dusty plasmas in supercritical carbon dioxide using surface dielectric barrier discharges

Review of electric discharge microplasmas generated in highly fluctuating fluids: Characteristics and application to nanomaterials synthesis

Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma

Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture

Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma

Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid

Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor

Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state

Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

Breakdown Characteristics of Electrical Discharges in High-Density Helium Near the Critical Point

Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

Development of Near-Infrared Laser Heterodyne Interferometry for Diagnostics of Electron and Gas Number Densities in Microplasmas

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