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Fundamental principles of optical lithography: the science of microfabrication

Mack, Chris

1st ed., 2008

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Fifty Years of Moore's Law

IEEE transactions on semiconductor manufacturing, 2011-05, Vol.24 (2), p.202-207

Mack, Chris A

2011

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Generating random rough edges, surfaces, and volumes

Applied optics (2004), 2013-03, Vol.52 (7), p.1472

Mack, Chris A.

2013

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Unbiased roughness measurements: Subtracting out SEM effects

Microelectronic engineering, 2018-04, Vol.190, p.33-37

2018

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Stochastic approach to modeling photoresist development

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-05, Vol.27 (3), p.1122-1128

Mack, Chris

2009

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Investigation of microstructured milling tool for deferring tool wear

Wear, 2011-07, Vol.271 (9), p.2433-2437

2011

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A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Optics express, 2013-06, Vol.21 (11), p.13710-13725

2013

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Pattern roughness analysis using power spectral density: application and impact in photoresist formulation

Journal of Micro/Nanopatterning, Materials, and Metrology, 2021-01, Vol.20 (1)

2021

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Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

Journal of Photopolymer Science and Technology, 2020/01/31, Vol.32(6), pp.779-790

2020

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Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process

Journal of Photopolymer Science and Technology, 2018/12/15, Vol.31(6), pp.679-687

2018

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Unbiased roughness measurements: Subtracting out SEM effects, part 2

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-11, Vol.36 (6)

2018

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A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Optics express, 2013-06, Vol.21 (11), p.13710

2013

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Errata: Stochastic modeling in lithography: autocorrelation behavior of catalytic reaction–diffusion systems

Journal of micro/nanolithography, MEMS, and MOEMS, 2012-06, Vol.11 (2), p.29801

Mack, Chris A.

2012

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Stochastic modeling in lithography: use of dynamical scaling in photoresist development

Journal of micro/nanolithography, MEMS, and MOEMS, 2009-07, Vol.8 (3), p.33001

Mack, Chris A.

2009

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Stochastic modeling in lithography: autocorrelation behavior of catalytic reaction–diffusion systems

Journal of micro/nanolithography, MEMS, and MOEMS, 2009-04, Vol.8 (2), p.29701

Mack, Chris A.

2009

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Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-11, Vol.34 (6)

Mack, Chris A.

2016

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Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2019-11, Vol.37 (6)

2019

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Examination of the Impact of Airbags on Renal Injury Using a National Database

Journal of the American College of Surgeons, 2010-09, Vol.211 (3), p.355-360

2010

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Systematic errors in the measurement of power spectral density

Journal of micro/nanolithography, MEMS, and MOEMS, 2013-09, Vol.12 (3), p.33016

Mack, Chris A.

2013

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How to write a good scientific paper: title, abstract, and keywords

Journal of micro/nanolithography, MEMS, and MOEMS, 2012-06, Vol.11 (2), p.20101

2012

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Special Section Guest Editorial: Advances in E-Beam Metrology

Journal of Micro/Nanopatterning, Materials, and Metrology, 2023-04, Vol.22 (2)

2023

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How to Write a Good Scientific Paper: Structure and Organization

Journal of micro/nanolithography, MEMS, and MOEMS, 2014-12, Vol.13 (4), p.40101

Mack, Chris

2014

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How to Write a Good Scientific Paper: Citations

Journal of micro/nanolithography, MEMS, and MOEMS, 2012-08, Vol.11 (3), p.30101

2012

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Analytical expression for impact of linewidth roughness on critical dimension uniformity

Journal of micro/nanolithography, MEMS, and MOEMS, 2014-04, Vol.13 (2), p.20501

Mack, Chris A.

2014

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More systematic errors in the measurement of power spectral density

Journal of micro/nanolithography, MEMS, and MOEMS, 2015-07, Vol.14 (3), p.33502

Mack, Chris A.

2015

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Fundamental principles of optical lithography: the science of microfabrication

Fifty Years of Moore's Law

Generating random rough edges, surfaces, and volumes

Unbiased roughness measurements: Subtracting out SEM effects

Stochastic approach to modeling photoresist development

Investigation of microstructured milling tool for deferring tool wear

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Pattern roughness analysis using power spectral density: application and impact in photoresist formulation

Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process

Unbiased roughness measurements: Subtracting out SEM effects, part 2

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Errata: Stochastic modeling in lithography: autocorrelation behavior of catalytic reaction–diffusion systems

Stochastic modeling in lithography: use of dynamical scaling in photoresist development

Stochastic modeling in lithography: autocorrelation behavior of catalytic reaction–diffusion systems

Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness

Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

Examination of the Impact of Airbags on Renal Injury Using a National Database

Systematic errors in the measurement of power spectral density

How to write a good scientific paper: title, abstract, and keywords

Special Section Guest Editorial: Advances in E-Beam Metrology

How to Write a Good Scientific Paper: Structure and Organization

How to Write a Good Scientific Paper: Citations

Analytical expression for impact of linewidth roughness on critical dimension uniformity

More systematic errors in the measurement of power spectral density

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