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A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure
Journal of microelectromechanical systems, 2022-04, Vol.31 (2), p.275-282
2022
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Metal-Coated SU-8 Structures for High-Density 3-D Microelectrode Arrays
Journal of microelectromechanical systems, 2016-06, Vol.25 (3), p.425-431
2016
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Exploration of Metal 3-D Printing Technologies for the Microfabrication of Freeform, Finely Featured, Mesoscaled Structures
Journal of microelectromechanical systems, 2018-12, Vol.27 (6), p.1171-1185
2018
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A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid
Journal of microelectromechanical systems, 2022-10, Vol.31 (5), p.771-776
2022
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Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers
Journal of microelectromechanical systems, 2023-10, Vol.32 (5), p.1-13
2023
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Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating
Journal of microelectromechanical systems, 2018-04, Vol.27 (2), p.156-163
2018
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Metal-Transfer-Micromolded Three-Dimensional Microelectrode Arrays for in-vitro Brain-Slice Recordings
Journal of microelectromechanical systems, 2011-04, Vol.20 (2), p.396-409
2011
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Electric impedance spectroscopy using microchannels with integrated metal electrodes
Journal of microelectromechanical systems, 1999-03, Vol.8 (1), p.50-57
1999
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Piston-motion micromirror based on electrowetting of liquid metals
Journal of microelectromechanical systems, 2005-04, Vol.14 (2), p.285-294
2005
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Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring
Journal of microelectromechanical systems, 2020-10, Vol.29 (5), p.720-726
2020
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Tilting Micromirror With a Liquid-Metal Pivot
Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1568-1575
2006
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Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression
Journal of microelectromechanical systems, 2023-08, Vol.32 (4), p.327-334
2023
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A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and Characterization
Journal of microelectromechanical systems, 2019-10, Vol.28 (5), p.744-754
2019
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Rapid and Inexpensive Method for Fabrication and Integration of Electrodes in Microfluidic Devices
Journal of microelectromechanical systems, 2019-08, Vol.28 (4), p.597-605
2019
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Anchor Losses in AlN Contour Mode Resonators
Journal of microelectromechanical systems, 2015-04, Vol.24 (2), p.265-275
2015
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Monolithic CMOS-MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance Enhancement
Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1916-1927
2015
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A 512-Channel Multi-Layer Polymer-Based Neural Probe Array
Journal of microelectromechanical systems, 2020-10, Vol.29 (5), p.1054-1058
2020
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Micromachined Particles for Detecting Metal-Ion Concentration in Fluids
Journal of microelectromechanical systems, 2006-10, Vol.15 (5), p.1299-1307
2006
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MEMS-Based Thermoelectric-Photoelectric Integrated Power Generator
Journal of microelectromechanical systems, 2019-02, Vol.28 (1), p.1-3
2019
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Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)
Journal of microelectromechanical systems, 2021-10, Vol.30 (5), p.814-822
2021
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Metallic Glass Hemispherical Shell Resonators
Journal of microelectromechanical systems, 2015-02, Vol.24 (1), p.19-28
2015
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Fabrication of Out-of-Plane High Channel Density Microelectrode Neural Array With 3D Recording and Stimulation Capabilities
Journal of microelectromechanical systems, 2020-08, Vol.29 (4), p.522-531
2020
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A New Microfabrication Method for Ion-Trap Chips That Reduces Exposure of Dielectric Surfaces to Trapped Ions
Journal of microelectromechanical systems, 2018-02, Vol.27 (1), p.28-30
2018
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A Sealed Liquid Cell for In Situ Transmission Electron Microscopy of Controlled Electrochemical Processes
Journal of microelectromechanical systems, 2015-08, Vol.24 (4), p.1061-1068
2015
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Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes
Journal of microelectromechanical systems, 2022-12, Vol.31 (6), p.877-887
2022
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