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Structural, optical and electrical properties of sputtered NiO thin films for gas detection

Applied surface science, 2017-02, Vol.395, p.208-213

2017

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Sputtered nanocrystalline NiO thin films for very low ethanol detection

Vacuum, 2014-09, Vol.107, p.129-131

2014

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Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching

Journal of micromechanics and microengineering, 2015-07, Vol.25 (7), p.74006-7

2015

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Sputtered TiO2 thin films with NiO additives for hydrogen detection

Applied surface science, 2013-03, Vol.269, p.110-115

2013

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Treatment of TiO2 surface for deposition of gold nanoparticles from colloidal suspension

Journal of micromechanics and microengineering, 2015-07, Vol.25 (7)

2015

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Double layer films based on TiO2 and NiOx for gas detection

Applied surface science, 2014-09, Vol.312, p.120-125

2014

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Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing

Applied surface science, 2014-09, Vol.312, p.107-111

2014

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Structural characterization of sputtered indium oxide films deposited at room temperature

Thin solid films, 2010-06, Vol.518 (16), p.4508-4511

2010

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NiO-based nanostructured thin films with Pt surface modification for gas detection

Thin solid films, 2006-10, Vol.515 (2), p.658-661

2006

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Structural and morphological evaluation of layered WS2 thin films

Vacuum, 2020-09, Vol.179, p.109570, Article 109570

2020

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Layered WS2 thin films prepared by sulfurization of sputtered W films

Applied surface science, 2021-04, Vol.544, p.148719, Article 148719

2021

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Effect of deposition temperature on the properties of amorphous silicon carbide thin films

Thin solid films, 2006-10, Vol.515 (2), p.651-653

2006

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Gallium arsenide suspended microheater for MEMS sensor arrays

Microsystem technologies, 2008-04, Vol.14 (4-5), p.629-635

2008

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Investigation of NiOx-based contacts on p-GaN

Journal of materials science. Materials in electronics, 2008, Vol.19 (8-9), p.855-862

2008

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Structural and optical properties of WS2 prepared using sulfurization of different thick sputtered tungsten films

Applied surface science, 2018-12, Vol.461, p.133-138

2018

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Dry etching characteristics of TiO2 thin films using inductively coupled plasma for gas sensing

Vacuum, 2014-09, Vol.107, p.20-22

2014

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Effects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin films

Thin solid films, 2009-12, Vol.518 (4), p.1103-1108

2009

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Study of Niobium Nitride Films Produced by DC Reactive Magnetron Sputtering

Physica status solidi. A, Applied research, 1997-05, Vol.161 (1), p.97-104

1997

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Thermal stability of NbN films deposited on GaAs substrates

Vacuum, 1998-05, Vol.50 (1), p.45-48

1998

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Processes on the target, discharge and NbN film behaviour in reactive dc magnetron deposition

Vacuum, 1995-12, Vol.46 (12), p.1407-1412

1995

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Electrical characterization of 4H–SiC Schottky diodes with a RuO2 and a RuWOx Schottky contacts

Journal of materials science. Materials in electronics, 2008, Vol.19 (8-9), p.783-787

2008

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Deposition and properties of nickel oxide films produced by DC reactive magnetron sputtering

Vacuum, 1998-10, Vol.51 (2), p.157-160

1998

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Preparation of thin GaAs suspended membranes for gas micro-sensors using plasma etching

Vacuum, 2007-10, Vol.82 (2), p.236-239

2007

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Further studies of N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

Thin solid films, 2004-07, Vol.459 (1), p.149-151

2004

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Reactive unbalanced magnetron sputtering of AlN thin films

Vacuum, 1998, Vol.50 (1-2), p.121-123

1998

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Structural, optical and electrical properties of sputtered NiO thin films for gas detection

Sputtered nanocrystalline NiO thin films for very low ethanol detection

Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching

Sputtered TiO2 thin films with NiO additives for hydrogen detection

Treatment of TiO2 surface for deposition of gold nanoparticles from colloidal suspension

Double layer films based on TiO2 and NiOx for gas detection

Patterning of titanium oxide surfaces using inductively coupled plasma for gas sensing

Structural characterization of sputtered indium oxide films deposited at room temperature

NiO-based nanostructured thin films with Pt surface modification for gas detection

Structural and morphological evaluation of layered WS2 thin films

Layered WS2 thin films prepared by sulfurization of sputtered W films

Effect of deposition temperature on the properties of amorphous silicon carbide thin films

Gallium arsenide suspended microheater for MEMS sensor arrays

Investigation of NiOx-based contacts on p-GaN

Structural and optical properties of WS2 prepared using sulfurization of different thick sputtered tungsten films

Dry etching characteristics of TiO2 thin films using inductively coupled plasma for gas sensing

Effects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin films

Study of Niobium Nitride Films Produced by DC Reactive Magnetron Sputtering

Thermal stability of NbN films deposited on GaAs substrates

Processes on the target, discharge and NbN film behaviour in reactive dc magnetron deposition

Electrical characterization of 4H–SiC Schottky diodes with a RuO2 and a RuWOx Schottky contacts

Deposition and properties of nickel oxide films produced by DC reactive magnetron sputtering

Preparation of thin GaAs suspended membranes for gas micro-sensors using plasma etching

Further studies of N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

Reactive unbalanced magnetron sputtering of AlN thin films

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