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Micro and Nano Engineering, 2023-12, Vol.21, p.100230, Article 100230
2023
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Nano Convergence, 2017, 4(4), , pp.1-10
2017
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Nanotechnology, 2018-09, Vol.29 (36), p.365302-365302
2018
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Microelectronic engineering, 2018-08, Vol.195, p.50-56
2018
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Microelectronic engineering, 2016-06, Vol.158, p.130-134
2016
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Microelectronic engineering, 2018-06, Vol.193, p.71-78
2018
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Vacuum, 2002-09, Vol.67 (1), p.101-113
2002
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Applied physics. A, Materials science & processing, 2009-11, Vol.97 (2), p.395-402
2009
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Journal of micromechanics and microengineering, 2011-03, Vol.21 (3), p.035016
2011
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Journal of micromechanics and microengineering, 2012-11, Vol.22 (11), p.115027-11
2012
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Journal of micromechanics and microengineering, 2010-08, Vol.20 (8), p.085011-085011
2010
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Journal of applied polymer science, 2011-06, Vol.120 (5), p.3042-3053
2011
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Journal of micromechanics and microengineering, 2009-12, Vol.19 (12), p.125025-125025 (11)
2009
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Microelectronic engineering, 2004-06, Vol.73, p.196-201
2004
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Microsystem technologies : sensors, actuators, systems integration, 2008-06, Vol.14 (6), p.815-819
2008
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-11, Vol.22 (6), p.3246-3250
2004
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Journal of polymer science. Part B, Polymer physics, 2004-03, Vol.42 (5), p.861-870
2004
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Microelectronic engineering, 2005-03, Vol.78, p.605-611
2005
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-01, Vol.25 (1), p.91-95
2007
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Journal of crystal growth, 2007-07, Vol.305 (1), p.40-44
2007
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