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A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

Plasma sources science & technology, 2017-11, Vol.26 (12), p.125003

2017

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An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2016-10, Vol.25 (6)

2016

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On the use of ultra-high resolution PIC methods to unveil microscale effects of plasma kinetic instabilities: electron trapping and release by electrostatic tidal effect

Plasma sources science & technology, 2022-04, Vol.31 (4), p.4

2022

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Plasma power balance: methodology and investigations of microwave capillary discharges

Plasma sources science & technology, 2022-05, Vol.31 (5), p.55003

2022

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Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics

Plasma sources science & technology, 2015-08, Vol.24 (4), p.45011-21

2015

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Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Plasma sources science & technology, 2012-04, Vol.21 (2), p.25005-1-9

2012

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Modeling of high power impulse magnetron sputtering discharges with graphite target

Plasma sources science & technology, 2021-11, Vol.30 (11), p.115017

2021

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Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

Plasma sources science & technology, 2023-07, Vol.32 (7), p.75016

2023

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The role of Ohmic heating in dc magnetron sputtering

Plasma sources science & technology, 2016-11, Vol.25 (6), p.65024

2016

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Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

Plasma sources science & technology, 2011-08, Vol.20 (4), p.45020

2011

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Preferential vibrational excitation in microwave nitrogen plasma assessed by Raman scattering

Plasma sources science & technology, 2018-05, Vol.27 (5), p.55006

2018

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Hydrodynamic and thermal effects of continuous microwave-sustained plasma in capillary tubes

Plasma sources science & technology, 2015-12, Vol.24 (6), p.65007-327

2015

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Comment on 'Issues in the understanding of negative ion extraction for fusion'

Plasma sources science & technology, 2017-04, Vol.26 (5), p.58001

2017

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Electron transport in magnetrons by a posteriori Monte Carlo simulations

Plasma sources science & technology, 2014-02, Vol.23 (1), p.15012-11

2014

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An ionization region model of the reactive Ar/O 2 high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2016-12, Vol.25 (6), p.65004

2016

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Fundamental aspects in non-reactive and reactive magnetron discharges

Plasma sources science & technology, 2003-11, Vol.12 (4), p.S33-S42

2003

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Simple model of power deposited into the plasma bulk of rf planar magnetrons

Plasma sources science & technology, 2003-02, Vol.12 (1), p.97-106

2003

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Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments

Plasma sources science & technology, 2013-04, Vol.22 (2), p.25006

2013

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Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics

Plasma sources science & technology, 2012-04, Vol.21 (2), p.25010-1-11

2012

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HiPIMS optimization by using mixed high-power and low-power pulsing

Plasma sources science & technology, 2021-01, Vol.30 (1), p.15015

2021

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On the electron energy distribution function in the high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2021-04, Vol.30 (4), p.45011

2021

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2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit

Plasma sources science & technology, 2018-10, Vol.27 (10), p.105009

2018

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Dynamic features of the electron drift and electron properties in a HiPIMS discharge

Plasma sources science & technology, 2022-11, Vol.31 (11), p.115018

2022

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A compact new incoherent Thomson scattering diagnostic for low-temperature plasma studies

Plasma sources science & technology, 2018-05, Vol.27 (5), p.55002

2018

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Experimental analysis of hyper power impulse magnetron discharge with long pulse operation

Plasma sources science & technology, 2024-10, Vol.33 (10), p.105005

2024

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A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

On the use of ultra-high resolution PIC methods to unveil microscale effects of plasma kinetic instabilities: electron trapping and release by electrostatic tidal effect

Plasma power balance: methodology and investigations of microwave capillary discharges

Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics

Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Modeling of high power impulse magnetron sputtering discharges with graphite target

Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

The role of Ohmic heating in dc magnetron sputtering

Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

Preferential vibrational excitation in microwave nitrogen plasma assessed by Raman scattering

Hydrodynamic and thermal effects of continuous microwave-sustained plasma in capillary tubes

Comment on 'Issues in the understanding of negative ion extraction for fusion'

Electron transport in magnetrons by a posteriori Monte Carlo simulations

An ionization region model of the reactive Ar/O 2 high power impulse magnetron sputtering discharge

Fundamental aspects in non-reactive and reactive magnetron discharges

Simple model of power deposited into the plasma bulk of rf planar magnetrons

Negative-ion surface production in hydrogen plasmas: modeling of negative-ion energy distribution functions and comparison with experiments

Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics

HiPIMS optimization by using mixed high-power and low-power pulsing

On the electron energy distribution function in the high power impulse magnetron sputtering discharge

2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit

Dynamic features of the electron drift and electron properties in a HiPIMS discharge

A compact new incoherent Thomson scattering diagnostic for low-temperature plasma studies

Experimental analysis of hyper power impulse magnetron discharge with long pulse operation

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