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What is limiting low-temperature atomic layer deposition of Al2O3? A vibrational sum-frequency generation study
Applied physics letters, 2016-01, Vol.108 (1)
2016
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Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
Applied physics letters, 2019-08, Vol.115 (8)
2019
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Initial Growth Study of Atomic-Layer Deposition of Al2O3 by Vibrational Sum-Frequency Generation
Langmuir, 2019-08, Vol.35 (32), p.10374-10382
2019
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Influence of the SiO2 interlayer thickness on the density and polarity of charges in Si/SiO2/Al2O3 stacks as studied by optical second-harmonic generation
Journal of applied physics, 2014-01, Vol.115 (3)
2014
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Surface Chemistry during Atomic Layer Deposition of Pt Studied with Vibrational Sum-Frequency Generation
Journal of physical chemistry. C, 2022-02, Vol.126 (5), p.2463-2474
2022
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Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO 2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
Journal of physical chemistry. C, 2021-11, Vol.125 (45), p.24945-24957
2021
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Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
Journal of physical chemistry. C, 2021-11, Vol.125 (45), p.24945-24957
2021
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Interaction between O2 and ZnO films probed by time-dependent second-harmonic generation
Applied physics letters, 2014-02, Vol.104 (5)
2014
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Influence of the spatial extent of the space-charge region in c-Si on the electric-field-induced second-harmonic-generation effect
Journal of the Optical Society of America. B, Optical physics, 2021-06, Vol.38 (6), p.1840
2021
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Initial growth study of atomic-layer deposition of Al 2 O 3 by vibrational sum-frequency generation
Langmuir, 2019-08, Vol.35 (32), p.10374-10382
2019
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Temperature study of atmospheric-pressure plasma-enhanced spatial ALD of Al2O3 using infrared and optical emission spectroscopy
Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-12, Vol.40 (6)
2022
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What is limiting low-temperature atomic layer deposition of Al{sub 2}O{sub 3}? A vibrational sum-frequency generation study
Applied physics letters, 2016-01, Vol.108 (1)
2016
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Influence of the SiO{sub 2} interlayer thickness on the density and polarity of charges in Si/SiO{sub 2}/Al{sub 2}O{sub 3} stacks as studied by optical second-harmonic generation
Journal of applied physics, 2014-01, Vol.115 (3)
2014
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Interaction between O{sub 2} and ZnO films probed by time-dependent second-harmonic generation
Applied physics letters, 2014-02, Vol.104 (5)
2014
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