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Application of Multicomponent Wear-Resistant Nanostructures Formed by Electrospark Allowing for Protecting Surfaces of Compression Joints Parts
Microstructure and Properties of Micro- and Nanoscale Materials, Films, and Coatings (NAP 2019), 2020, Vol.240, p.195-209
2020
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New Process for Forming Multicomponent Wear-Resistant Nanostructures by Electrospark Alloying Method
Microstructure and Properties of Micro- and Nanoscale Materials, Films, and Coatings (NAP 2019), 2020, Vol.240, p.135-149
2020
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Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile
Journal of micromechanics and microengineering, 2021-07, Vol.31 (7), p.75001
2021
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MEMS-Based Tunable Fabry-Perot Filters for Adaptive Multispectral Thermal Imaging
Journal of microelectromechanical systems, 2016-02, Vol.25 (1), p.227-235
2016
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Ge/ZnS-Based Micromachined Fabry-Perot Filters for Optical MEMS in the Longwave Infrared
Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.2109-2116
2015
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Optimization of ICPCVD Amorphous Silicon for Optical MEMS Applications
Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1998-2007
2015
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Suspended Large-Area MEMS-Based Optical Filters for Multispectral Shortwave Infrared Imaging Applications
Journal of microelectromechanical systems, 2015-08, Vol.24 (4), p.1102-1110
2015
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Thin-film mid-infrared semiconductor waveguide technology
2014 Conference on Optoelectronic and Microelectronic Materials & Devices, 2014, p.301-302
2014
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Low temperature through-wafer reactive ion etching for MEMS
2014 Conference on Optoelectronic and Microelectronic Materials & Devices, 2014, p.83-86
2014
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High density plasma processing of p-Hg0.7Cd0.3Te
2006 Conference on Optoelectronic and Microelectronic Materials and Devices, 2006, p.260-263
2006
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Optical Performance of a MEMS Tunable IR Microspectrometer
2006 Conference on Optoelectronic and Microelectronic Materials and Devices, 2006, p.224-227
2006
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Quantitative mobility spectrum analysis of carriers in GaSb/InAs/GaSb superlattice
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-05, Vol.26 (3), p.1081-1083
2008
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HgCdTe photovoltaic detectors fabricated using a new junction formation technology
Microelectronics, 2000-07, Vol.31 (7), p.545-551
2000
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MEMS-based microspectrometers for infrared sensing
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 2007, p.137-138
2007
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