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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-03, Vol.26 (2), p.598-605

2008

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Direct microscale imprinting of Al at room temperature with Si inserts

Microsystem technologies : sensors, actuators, systems integration, 2008-06, Vol.14 (6), p.815-819

2008

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Stamps for nanoimprint lithography by extreme ultraviolet interference lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-11, Vol.22 (6), p.3246-3250

2004

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The role of hydrophobic silane coating on Si stamps in nanoimprint lithography

Effects of internal linkage groups of fluorinated diamine on the optical and dielectric properties of polyimide thin films

Engineering inlet structures to enhance DNA capture into nanochannels in a polymer nanofluidic device produced via nanoimprint lithography

Polymerization shrinkage stress measurement for a UV-curable resist in nanoimprint lithography

Propulsion of droplets on micro- and sub-micron ratchet surfaces in the Leidenfrost temperature regime

Controlled co-evaporation of silanes for nanoimprint stamps

3D nanomolding and fluid mixing in micromixers with micro-patterned microchannel walls

Selection of UV-resins for nanostructured molds for thermal-NIL

Correlation of residual stress and adhesion on copper by the effect of chemical structure of polyimides for copper-clad laminates

Fabrication of polymer photonic crystals using nanoimprint lithography

Study on demolding temperature in thermal imprint lithography via finite element analysis

Photonic band gaps and defect modes of polymer photonic crystal slabs

Energy level alignment driven by electron affinity difference at 3,4,9,10-perylenetetracarboxylic dianhydride/n-GaAs(100) interfaces

Tuning Schottky barrier heights by organic modification of metal-semiconductor contacts

Nano-Imprint - Molding Resists for Lithography

Demolding temperature in thermal nanoimprint lithography

3D molding of hierarchical micro- and nanostructures

Deformation behavior in 3D molding: experimental and simulation studies

Water sorption behaviors of the BPDA-based polyimide films depending upon the structural isomers of diamine

A microfluidic platform with a free-standing perforated polymer membrane

Biocompatible/bioabsorbable silver nanocomposite coatings

Passive micro-assembly of modular, hot embossed, polymer microfluidic devices using exact constraint design

Simulation study on stress and deformation of polymeric patterns during the demolding process in thermal imprint lithography

Direct microscale imprinting of Al at room temperature with Si inserts

Stamps for nanoimprint lithography by extreme ultraviolet interference lithography

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