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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2005-07, Vol.23 (4), p.1351-1360
2005
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1987-03, Vol.5 (2), p.469-495
1987
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-11, Vol.21 (6), p.2231-2261
2003
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-03, Vol.26 (2), p.495-501
2008
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-07, Vol.21 (4), p.1528-1544
2003
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2010-11, Vol.28 (6), p.C6-C6F21
2010
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-07, Vol.21 (4), p.1828-1838
2003
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2014-07, Vol.32 (4)
2014
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-11, Vol.25 (6), p.2658-2661
2007
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2010-03, Vol.28 (2), p.C2-C2C36
2010
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1988-11, Vol.6 (6), p.2153-2157
1988
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-01, Vol.22 (1), p.289-296
2004
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-07, Vol.21 (4), p.1765-1772
2003
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-11, Vol.27 (6), p.2648-2653
2009
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-07, Vol.26 (4), p.1363-1367
2008
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-05, Vol.27 (3), p.1086-1092
2009
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-09, Vol.26 (5), p.1794-1799
2008
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000-03, Vol.18 (2), p.1059-1063
2000
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003-07, Vol.21 (4), p.1705-1709
2003
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-09, Vol.24 (5), p.2312-2316
2006
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-05, Vol.24 (3), p.1556-1558
2006
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2001-09, Vol.19 (5), p.1857-1865
2001
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2005-05, Vol.23 (3), p.1036-1040
2005
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2007-11, Vol.25 (6), p.1743-1761
2007
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Zeitschrift / SerieApplied Physics Letters
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Zeitschrift / SerieJournal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
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